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Overview

General comment

Silicon-carbide half-bridge power module: sintered-silver die attach on an active-metal-brazed silicon-nitride substrate over a copper baseplate.

Technology
SiC half-bridge power module – AMB Si3N4 substrate + Ag-sinter die attach + Cu baseplate + silicone grease TIM
Geography
DE manufacturing default. Module sub-component mfg can span TW/KR/CN (SiC dies fab) + JP (some passives) + DE (final assembly).

System boundary

System boundary - SiC Power ModuleSystem boundary figure: identity, gate in, entering flows, the dashed system boundary and the unit processes inside it, the reference product, emissions and waste, and below it the flows that are recorded but not quantified. No inventory quantities.SiC Power ModuleGATE INRaw materials and ceramic + Cu substratefabrication; SiC die fabrication is adeclared unquantified gapENTERING FLOWSElectricityWaterProcess gasesMaterialsSYSTEM BOUNDARYMODELLED PROCESS SEQUENCEProcess sequenceAMB substrate fabricationAg sinter die attachWire bondingBaseplate assemblySilicone gel pottingTIM heatsink interfaceEncapsulation + final electrical testREFERENCE PRODUCTSiC Power ModuleTested module ready for inverterintegrationEMISSIONS AND WASTEEmissions to airEmissions to waterWaste routesRECORDED BUT NOT QUANTIFIEDIn scope, left out of the quantified inventoryCut off below the significance threshold, or with no background dataset available - each is listed with its reason7FLOWSsystem boundaryreference flowentering flowemission / waste

The figure groups this dataset's unit processes by class. It is not a count of manufacturing steps — each process runs over as many passes as the flow requires, and those pass counts ship with the dataset.

Download this figure (SVG)

Data quality and references

Composite DQI 1.7 Very good
Reliability
2.5
Completeness
2.5
Temporal
1.0
Geographic
2.0
Technological
1.0
How the score is calculated: Constituent datasets have more influence when they contribute a larger share of the modelled cradle-to-gate energy demand.

Pedigree scores follow the ecoinvent data-quality matrix: 1 is the best attainable, 5 the weakest. The composite is their aggregate.

Sampling procedure
Published vendor datasheets for representative modules (Wolfspeed CAB006M12FM3, Infineon FF600R12IE5)
Coverage status
Partial
Pedigree-scored source files
7 — the source records behind this dataset's manufacturing operations. Each carries the five pedigree axes above; the composite DQI aggregates them.

Technosphere inputs

20 flows. Quantities are not published; they ship with the dataset on Circa.

Copper Materialkg
Derivation basis
  • Calculated from per-operation consumption, operation counts, and manufacturing yield.

The sources for this row are listed below.

Source citations (dataset-level)
  • Wolfspeed CAB006M12FM3 datasheet (public)
  • Infineon HybridPACK FF600R12IE5 datasheet (public, Si IGBT analog)
Background data
ecoinvent 3.12
Background dataset
copper, cathode
Uncertainty
No range defined.
Unit
kg
Stainless Steel Materialkg
Derivation basis
  • Calculated from per-operation consumption, operation counts, and manufacturing yield.

The sources for this row are listed below.

Source citations (dataset-level)
  • Wolfspeed CAB006M12FM3 datasheet (public)
  • Infineon HybridPACK FF600R12IE5 datasheet (public, Si IGBT analog)
Background data
ecoinvent 3.12
Background dataset
steel, chromium steel 18/8, hot rolled
Uncertainty
No range defined.
Unit
kg
Copper baseplate Materialkg · ±33.3%
Source citations
Background data
ecoinvent 3.12
Background dataset
copper, cathode
Uncertainty
±33.3% around the published quantity. The bounds themselves ship with the dataset on Circa.
Unit
kg
Electrolytic copper (OFE) Materialkg
Source citations
Background data
ecoinvent 3.12
Background dataset
copper, cathode
Uncertainty
No range defined.
Unit
kg
Flux (rosin/no-clean type) Materialkg · -50% / +300%
Source citations
Background data
ecoinvent 3.12
Background dataset
flux, for wave soldering
Uncertainty
-50% / +300% around the published quantity. The bounds themselves ship with the dataset on Circa.
Unit
kg
Tin Materialkg
Source citations
Background data
ecoinvent 3.12
Background dataset
tin
Notes
From SAC305 solder paste (default – RoHS-compliant) (82.0% tin)
Uncertainty
No range defined.
Unit
kg
Silver Materialkg
Source citations
Background data
ecoinvent 3.12
Background dataset
silver
Notes
From SAC305 solder paste (default – RoHS-compliant) (2.5% silver). v3.10 GLO market for silver
Uncertainty
No range defined.
Unit
kg
Copper, cathode Materialkg
Source citations
Background data
ecoinvent 3.12
Background dataset
copper, cathode
Notes
From SAC305 solder paste (default – RoHS-compliant) (0.4% copper)
Uncertainty
No range defined.
Unit
kg
Flux, for wave soldering Materialkg
Source citations
Background data
ecoinvent 3.12
Background dataset
flux, for wave soldering
Notes
From SAC305 solder paste (default – RoHS-compliant) (11.0% flux)
Uncertainty
No range defined.
Unit
kg
Thermal interface material Materialkg · -52.4% / +197.6%
Source citations
  • Semikron Danfoss International, Application Note AN 18-001, "Thermal Paste Application", Revision 01, issue date 2024-05-31, 23 pp
  • Wacker Chemie AG, "WACKER(R) SILICONE PASTE P 12 -- Thermally conductive silicone paste", technical data sheet, Version 1.5, date of last alteration 14.04.2014, 2 pp
  • Wacker Chemie AG, Safety Data Sheet (1907/2006/EC), Material 60003095, "WACKER(R) SILICONE PASTE P 12 HEAT SINK COMPOUND", Version 4.3 (GB), date of print 26.03.2019, date of last alteration 06.06.2018, 9 pp
  • Henkel, Technical Data Sheet, BERGQUIST GAP FILLER TGF 4000 (known as BERGQUIST GAP FILLER 4000), September 2023, Reference 2, 2 pp
Background data
ecoinvent 3.12
Background dataset
silicone product
Uncertainty
-52.4% / +197.6% around the published quantity. The bounds themselves ship with the dataset on Circa.
Unit
kg
Aluminum Oxide Filler Materialkg
Derivation basis
  • TIM formulation literature

No source is attached to this row.

Source citations
Not stated
Background data
proxy-mapped
Background dataset
aluminium oxide, metallurgical
Uncertainty
No range defined.
Unit
kg
Silicone Base Materialkg
Derivation basis
  • TIM formulation literature

No source is attached to this row.

Source citations
Not stated
Background data
ecoinvent 3.12
Background dataset
silicone product
Uncertainty
No range defined.
Unit
kg
Zinc Oxide Filler Materialkg
Derivation basis
  • TIM formulation literature

No source is attached to this row.

Source citations
Not stated
Background data
ecoinvent 3.12
Background dataset
zinc oxide
Uncertainty
No range defined.
Unit
kg
Electricity, Global (GLO) ElectricitykWh · -45.3% / +73.9%
Derivation basis
  • Calculated from equipment energy across all manufacturing operations. This model includes no facility support, so the total is the manufacturing operations alone.

The sources for this row are listed below.

Source citations (dataset-level)
  • Wolfspeed CAB006M12FM3 datasheet (public)
  • Infineon HybridPACK FF600R12IE5 datasheet (public, Si IGBT analog)
Background data
ecoinvent 3.12
Background dataset
electricity, medium voltage
Notes
Energy demand from AMB substrate, Ag sinter die attach, wire bonding, baseplate assembly and silicone gel potting, adjusted for assembly yield.
Uncertainty
-45.3% / +73.9% around the published quantity. The bounds themselves ship with the dataset on Circa.
Unit
kWh
Process water WaterL · -60% / +200%
Derivation basis
  • Calculated from process-water and ultrapure-water demand across all manufacturing operations. This model includes no facility support, so the demand is the manufacturing operations alone. The fresh intake shown is that demand less the share reused under the water-recycling scenario this dataset assumes, and wastewater follows the same balance.

No source is attached to this row.

Source citations
Not stated
Background data
ecoinvent 3.12
Background dataset
tap water
Notes
Water demand from baseplate assembly, adjusted for assembly yield.
Uncertainty
-60% / +200% around the published quantity. The bounds themselves ship with the dataset on Circa.
Unit
L
Nitrogen (inert atmosphere) Process gasg · -40% / +100%
Derivation basis
  • Calculated from per-operation consumption, operation counts, and manufacturing yield.

No source is attached to this row.

Source citations
Not stated
Background data
ecoinvent 3.12
Background dataset
nitrogen, liquid
Uncertainty
-40% / +100% around the published quantity. The bounds themselves ship with the dataset on Circa.
Unit
g
Nitrogen (N2) Process gasg · -25.4% / +49.1%
Source citations
Background data
ecoinvent 3.12
Background dataset
nitrogen, liquid
Uncertainty
-25.4% / +49.1% around the published quantity. The bounds themselves ship with the dataset on Circa.
Unit
g
Hydrogen (H2) Process gasg · -25.4% / +49.2%
Source citations
Background data
ecoinvent 3.12
Background dataset
hydrogen, gaseous, low pressure
Uncertainty
-25.4% / +49.2% around the published quantity. The bounds themselves ship with the dataset on Circa.
Unit
g
Nitrogen (N2 reflow atmosphere) Process gasg · -40% / +100%
Derivation basis
  • Calculated from per-operation consumption, operation counts, and manufacturing yield.

No source is attached to this row.

Source citations
Not stated
Background data
ecoinvent 3.12
Background dataset
nitrogen, liquid
Uncertainty
-40% / +100% around the published quantity. The bounds themselves ship with the dataset on Circa.
Unit
g
N2 Process gasg · -30% / +50%
Derivation basis
  • Calculated from per-operation consumption, operation counts, and manufacturing yield.

No source is attached to this row.

Source citations
Not stated
Background data
ecoinvent 3.12
Background dataset
nitrogen, liquid
Uncertainty
-30% / +50% around the published quantity. The bounds themselves ship with the dataset on Circa.
Unit
g

Outputs and waste

Reject Cu (brazing void / delamination scrap) Solid wasteg
Derivation basis
  • Calculated from the mass balance of spent materials and consumables, with treatment selected from the waste classification.

The sources below come from the manufacturing operations behind this row.

Sources (inherited)
Inherited, rolled up from the contributing process steps:
Background data
ecoinvent 3.12 treatment route
Background dataset
market for copper scrap, sorted, pressed
Uncertainty
No range defined.
Unit
g
Reject ceramic (Si3N4) Solid wasteg
Derivation basis
  • Calculated from the mass balance of spent materials and consumables, with treatment selected from the waste classification.

The sources below come from the manufacturing operations behind this row.

Sources (inherited)
Inherited, rolled up from the contributing process steps:
Background data
ecoinvent 3.12 treatment route
Background dataset
treatment of inert waste, sanitary landfill
Uncertainty
No range defined.
Unit
g
Reject brazing alloy Solid wasteg
Derivation basis
  • Calculated from the mass balance of spent materials and consumables, with treatment selected from the waste classification.

The sources below come from the manufacturing operations behind this row.

Sources (inherited)
Inherited, rolled up from the contributing process steps:
Background data
ecoinvent 3.12 treatment route
Background dataset
treatment of hazardous waste, underground deposit
Uncertainty
No range defined.
Unit
g
Spent buffer pads (PTFE – fluorinated polymer) Solid wasteg
Derivation basis
  • Calculated from the mass balance of spent materials and consumables, with treatment selected from the waste classification.

The sources below come from the manufacturing operations behind this row.

Sources (inherited)
Inherited, rolled up from the contributing process steps:
Background data
ecoinvent 3.12 treatment route
Background dataset
treatment of hazardous waste, hazardous waste incineration, with energy recovery
Uncertainty
No range defined.
Unit
g
Reject Ag-sinter paste / failed dies (precious metal recovery) Solid wasteg
Derivation basis
  • Calculated from the mass balance of spent materials and consumables, with treatment selected from the waste classification.

The sources below come from the manufacturing operations behind this row.

Sources (inherited)
Inherited, rolled up from the contributing process steps:
Background data
ecoinvent 3.12 treatment route
Background dataset
market for precious metal from electronics scrap, in anode slime
Uncertainty
No range defined.
Unit
g
Reject baseplate Solid wasteg
Derivation basis
  • Calculated from the mass balance of spent materials and consumables, with treatment selected from the waste classification.

The sources below come from the manufacturing operations behind this row.

Sources (inherited)
Inherited, rolled up from the contributing process steps:
Background data
ecoinvent 3.12 treatment route
Background dataset
market for copper scrap, sorted, pressed
Uncertainty
No range defined.
Unit
g
Reject solder Solid wasteg
Derivation basis
  • Calculated from the mass balance of spent materials and consumables, with treatment selected from the waste classification.

The sources below come from the manufacturing operations behind this row.

Sources (inherited)
Inherited, rolled up from the contributing process steps:
Background data
ecoinvent 3.12 treatment route
Background dataset
treatment of hazardous waste, underground deposit
Uncertainty
No range defined.
Unit
g
Thermal-compound mixing residue Solid wasteg
Derivation basis
  • Calculated from the mass balance of spent materials and consumables, with treatment selected from the waste classification.

No source is attached to this row.

Source citations
Not stated
Background data
ecoinvent 3.12 treatment route
Background dataset
treatment of inert waste, sanitary landfill
Uncertainty
No range defined.
Unit
g
Thermal-compound packaging waste Solid wasteg
Derivation basis
  • Calculated from the mass balance of spent materials and consumables, with treatment selected from the waste classification.

No source is attached to this row.

Source citations
Not stated
Background data
ecoinvent 3.12 treatment route
Background dataset
treatment of waste plastic, mixture, municipal incineration
Uncertainty
No range defined.
Unit
g
Out-of-spec thermal compound Solid wasteg
Derivation basis
  • Calculated from the mass balance of spent materials and consumables, with treatment selected from the waste classification.

No source is attached to this row.

Source citations
Not stated
Background data
ecoinvent 3.12 treatment route
Background dataset
treatment of inert waste, sanitary landfill
Uncertainty
No range defined.
Unit
g
Excess/wiped TIM (all classes) Solid wasteg
Source citations
  • Semikron Danfoss International, Application Note AN 18-001, "Thermal Paste Application", Revision 01, issue date 2024-05-31, 23 pp
  • Wacker Chemie AG, "WACKER(R) SILICONE PASTE P 12 -- Thermally conductive silicone paste", technical data sheet, Version 1.5, date of last alteration 14.04.2014, 2 pp
  • Henkel, Technical Data Sheet, LOCTITE(R) ABLESTIK 286, November 2024, 1 p
  • Henkel, Technical Data Sheet, LOCTITE(R) ABLESTIK ABP 2025DNP, January 2025, 2 pp
  • Henkel, Technical Data Sheet, BERGQUIST GAP FILLER TGF 4000 (known as BERGQUIST GAP FILLER 4000), September 2023, Reference 2, 2 pp
  • Parker Hannifin Corporation, Chomerics Division, "Thermal Interface Material Dispensing Guide -- For Thermally Conductive Gels, Cure-in-Place Potting Compounds and Thermal Greases", document MB 1006 EN May 2021, (c) 2021, 20 pp
Background data
ecoinvent 3.12 treatment route
Background dataset
treatment of inert waste, sanitary landfill
Uncertainty
No range defined.
Unit
g
Injection-molding runner and sprue scrap Solid wasteg
Derivation basis
  • Calculated from the mass balance of spent materials and consumables, with treatment selected from the waste classification.

No source is attached to this row.

Source citations
Not stated
Background data
ecoinvent 3.12 treatment route
Background dataset
treatment of inert waste, sanitary landfill
Uncertainty
No range defined.
Unit
g

Emissions to air

2 elementary flows released to air by this dataset's own operations. Quantities are not published; they ship with the dataset on Circa.

VOCs Emission to airg
Source citations
Compartment
Air (non-urban air or from high stacks)
ecoinvent 3.12 elementary flow
NMVOC, non-methane volatile organic compounds
Uncertainty
No range defined.
Unit
g
particulates Emission to airg
Derivation basis
  • Dust control estimates

No source is attached to this row.

Source citations
Not stated
Compartment
Air (non-urban air or from high stacks)
ecoinvent 3.12 elementary flow
Particulate Matter, < 2.5 um
Uncertainty
No range defined.
Unit
g

Emissions to water

No emissions to water are recorded at this level.

Flows not quantified

7 flows are recorded for this dataset but carry no quantity — cut off below the significance threshold, or with no background dataset available. They remain inside the declared system boundary; each is listed with its reason.

Cut off - below the significance threshold (1)

Plastic Compound Materialkg
Derivation basis
  • Calculated from per-operation consumption, operation counts, and manufacturing yield.

The sources for this row are listed below.

Source citations (dataset-level)
  • Wolfspeed CAB006M12FM3 datasheet (public)
  • Infineon HybridPACK FF600R12IE5 datasheet (public, Si IGBT analog)
Background data
cut off
Background dataset
Not applicable: this flow is not quantified in the inventory.
Reason
A generic plastic housing or insulation material, recorded in this inventory. Where its mass is significant it is tracked as a named plastic at component level, so no upstream production dataset is attached to this catch-all entry.
Uncertainty
No range defined.
Unit
kg

Not modelled (6)

Active brazing alloy (Cu-Sn-Ti) Materialkg · -50% / +100.1%
Source citations
Background data
not modelled
Background dataset
Not applicable: this flow is not quantified in the inventory.
Reason
The quantified material is retained, but its authored name does not identify a sufficiently specific background dataset or defensible proxy; background modeling remains an explicit gap.
Uncertainty
-50% / +100.1% around the published quantity. The bounds themselves ship with the dataset on Circa.
Unit
kg
Ag-sinter paste (90-99% Ag micro/nano particles + organic solvents) Materialkg · -50% / +57.5%
Source citations
Background data
not modelled
Background dataset
Not applicable: this flow is not quantified in the inventory.
Reason
The quantified material is retained, but its authored name does not identify a sufficiently specific background dataset or defensible proxy; background modeling remains an explicit gap.
Uncertainty
-50% / +57.5% around the published quantity. The bounds themselves ship with the dataset on Circa.
Unit
kg
Buffer pads (PTFE) – die protection during pressure sintering Materialkg · -54.5% / +127.2%
Source citations
Background data
not modelled
Background dataset
Not applicable: this flow is not quantified in the inventory.
Reason
The quantified material is retained, but its authored name does not identify a sufficiently specific background dataset or defensible proxy; background modeling remains an explicit gap.
Uncertainty
-54.5% / +127.2% around the published quantity. The bounds themselves ship with the dataset on Circa.
Unit
kg
Silicon nitride (Si3N4) Materialkg · ±4.9%
Source citations
Background data
not modelled
Background dataset
Not applicable: this flow is not quantified in the inventory.
Reason
The quantified material is retained, but its authored name does not identify a sufficiently specific background dataset or defensible proxy; background modeling remains an explicit gap.
Uncertainty
±4.9% around the published quantity. The bounds themselves ship with the dataset on Circa.
Unit
kg
Syringe and tube packaging Materialkg
Derivation basis
  • Packaging material estimates

No source is attached to this row.

Source citations
Not stated
Background data
not modelled
Background dataset
Not applicable: this flow is not quantified in the inventory.
Reason
The quantified material is retained, but its authored name does not identify a sufficiently specific background dataset or defensible proxy; background modeling remains an explicit gap.
Uncertainty
No range defined.
Unit
kg
SiC MOSFET die fabrication Materialdie
Derivation basis
Not stated
Source citations
Not stated
Background data
not modelled
Background dataset
Not applicable: this flow is not quantified in the inventory.
Reason
SiC MOSFET die fabrication is declared but not linked from the module assembly model; the die-production burden is recorded but not quantified in this dataset - deferred, not judged immaterial.
Uncertainty
No range defined.
Unit
die

Limitations and unquantified flows (4)

Limits this dataset declares about itself: first any limit stated in its own description, then any limit it declares flow by flow, grouped by channel. Each entry below is the model's own disclosure.

Materials

  • These flows are named in this inventory but ship without a quantity, so their burden is not carried anywhere in the dataset: SiC MOSFET die fabrication. Each row states its own reason on the row itself.

General

  • The declared mass of this module includes a small remainder that its itemised material breakdown does not identify. The listed constituents account for nearly all of the declared mass, and the balance is not attributed to any named material, so nothing here says what that remainder is made of. The declared total is kept as it stands rather than trimmed to the parts that are named, and the remainder is recorded as an open reconciliation rather than absorbed into a constituent that did not earn it.
  • The silver-sinter die attach on this module is quantified twice over and the two declarations do not agree. This dataset buys the paste the sintering process applies over the die-attach interface, while the module's own itemised mass carries a slightly heavier joint. The solvent release and the silver-bearing reject follow the heavier one, because they are derived from the paste that made the joint; the purchased paste follows the process rate. The difference between the two is small and is not resolved here. The rejected material itself is not bought by any purchase this dataset carries: the sintering process exports it as a silver-bearing reject on the strength of its own over-provisioning allowance, and no input row anywhere in this dataset buys the extra paste that allowance describes.
  • The filled thermal-compound residues on this module ship on a general non-hazardous landfill route. A ceramic-filled silicone is largely mineral once its polymer has burned, so that route is a placeholder rather than a supported disposition for them, and establishing a material-specific fate is open research. The packaging residue beside them is an unfilled polymer and now carries the combustible-organic fate its material supports. No recycling route on any of these residues is funded by a disclosed sale, so none is claimed.

The flows above are this dataset's own records. What follows are the scope rules set once for the whole database in the methodology report, repeated here so every dataset page carries them.

Database-wide boundary policy — applies to every REEL dataset

These boundaries are set once for the whole database, in Chapter 2 of the methodology report, and apply to this dataset wherever they are relevant to it. The excluded flows listed above are specific to this dataset.

Use phase
Product operation is outside the cradle-to-gate scope.
End-of-life treatment
Recycling and disposal are outside the cradle-to-gate scope.
Distribution and retail
The gate is a finished component ready for integration into a higher-level assembly.
Inbound transport of raw materials
Transport of purchased raw materials to the manufacturing facility is already inside the upstream "market for" datasets that users link to a background database, so it is not modelled a second time here. This does not cover freight between REEL production stages, which is modelled where a dataset authors it.
Returnable shipping containers
Where freight between production stages is modelled, the mass moved is the product itself. The shipping container (FOSB, SEMI M31) is returnable capital equipment whose per-trip share is unsourced, so its tare is excluded from the transport effort.
Photomask fabrication
A mask set's embodied burden is amortised across a high-volume production run and is not attributed per wafer. Users assessing low-volume production should add mask fabrication separately; the methodology report gives the basis for the exclusion.
Employee transport, administration and R&D overhead
Employee transportation, facility administration and R&D/pilot-production overhead are outside scope.
Capital goods
Manufacturing equipment, cleanroom construction and facility infrastructure are excluded, on the grounds of absent public data on equipment embodied energy, uncertainty in equipment lifetime and allocation, common practice in electronics LCA, and a focus on the operational inventory. Future versions may include capital goods when sufficient public data becomes available.
Precious metal recovery credits
Scrap recovery credits for precious metals are excluded pending data availability.
Wafer reclaim
Test wafers and scrap are outside the system boundary.

Inside the boundary, linked rather than modelled

Silicon ingot growth and wafer slicing
Inside the cradle-to-gate scope, but treated as upstream material inputs linked to background databases rather than modelled as REEL processes.
Freight between production stages
Where a dataset's product moves between REEL production stages - wafer fabrication to the packaging site, for example - that leg is authored as a transport service and linked to an ecoinvent freight activity. It is measured as a transport effort in tonne-kilometres, not as a mass. Route distances are authored per route class with a stated band; a lower bound of zero is a modelling statement that the two sites can be co-located, not a missing value.

Cut-off criteria

A flow is excluded from a process inventory when it contributes less than 1 % of the total mass of inputs to that unit process, or less than 1 % of its total energy input. The denominator is total process inputs, not product mass. That distinction matters in semiconductor manufacturing, where the input mass of water, chemicals and gases greatly exceeds the product mass, so the threshold removes only genuinely minor flows.

Included regardless of the cut-off

  • Perfluorocarbons (CF4, C2F6, SF6, NF3) - high GWP, EPA regulated
  • Heavy metals (Pb, Cd, Hg, Cr(VI)) - RoHS regulated, high toxicity
  • Volatile organics (photoresist solvents, PGMEA) - air quality
  • Precious metals (Au, Ag, Pd, Pt) - high embodied impacts
  • Ozone-depleting substances (legacy CFCs, HCFCs) - Montreal Protocol