Overview
- Technology
- Formulation blending of polymer resin, photoacid generator, quencher and additives into PGMEA carrier solvent
- Geography
- Global
System boundary
The figure groups this dataset's unit processes by class. It is not a count of manufacturing steps — each process runs over as many passes as the flow requires, and those pass counts ship with the dataset.
Data quality and references
Pedigree scores follow the ecoinvent data-quality matrix: 1 is the best attainable, 5 the weakest. The composite is their aggregate.
- Sampling procedure
- Resist supplier product information, lithography-conference proceedings, and photoresist chemistry literature. Commercial formulations are proprietary, so the component split is assembled from published composition ranges; the solvent links a published third-party production dataset and the specialty polymer, photoacid generator, and fluorinated surfactant are represented by chemically similar proxies.
- Coverage status
- Complete
- Pedigree-scored source files
- Not stated
- Dataset sources
-
- Photoresist chemistry literature
- JSR, TOK product information
- SPIE Proceedings on lithography materials
Technosphere inputs
10 flows. Quantities are not published; they ship with the dataset on Circa.
PGMEA Materialkg · -5.9% / +3.5%
- Derivation basis
-
- The model specifies this input from the production route, either from the chemistry of the reaction or from the allowance the route sets for it. It also states the excess the route uses and the share it recovers for reuse.
- No corresponding ecoinvent dataset or flow was identified for this entry; its background is carried by the mapped dataset named on this row
The sources for this row are listed below.
- Source citations (dataset-level)
-
- JSR, TOK product information
- SPIE Proceedings on lithography materials
- Background data
- CarbonMinds
- Background dataset
- propylene glycol methyl ether acetate (PGMEA)
- Notes
- Primary component by weight
- Uncertainty
- -5.9% / +3.5% around the published quantity. The bounds themselves ship with the dataset on Circa.
- Unit
- kg
Acrylic copolymer (proxy) Materialkg · -20% / +50%
- Derivation basis
-
- The model specifies this input from the production route, either from the chemistry of the reaction or from the allowance the route sets for it. It also states the excess the route uses and the share it recovers for reuse.
The sources for this row are listed below.
- Source citations (dataset-level)
-
- JSR, TOK product information
- SPIE Proceedings on lithography materials
- Background data
- proxy-mapped
- Background dataset
- methyl methacrylate
- Notes
- 10% polymer solids
- Uncertainty
- -20% / +50% around the published quantity. The bounds themselves ship with the dataset on Circa.
- Unit
- kg
Photoacid generator (PAG) Materialkg · -33.3% / +66.7%
- Derivation basis
-
- The model specifies this input from the production route, either from the chemistry of the reaction or from the allowance the route sets for it. It also states the excess the route uses and the share it recovers for reuse.
The sources for this row are listed below.
- Source citations (dataset-level)
-
- JSR, TOK product information
- SPIE Proceedings on lithography materials
- Background data
- proxy-mapped
- Background dataset
- chemical, organic, unspecified
- Notes
- 3% PAG
- Uncertainty
- -33.3% / +66.7% around the published quantity. The bounds themselves ship with the dataset on Circa.
- Unit
- kg
Amine base quencher Materialkg · -66.7% / +33.3%
- Derivation basis
-
- The model specifies this input from the production route, either from the chemistry of the reaction or from the allowance the route sets for it. It also states the excess the route uses and the share it recovers for reuse.
The sources for this row are listed below.
- Source citations (dataset-level)
-
- JSR, TOK product information
- SPIE Proceedings on lithography materials
- Background data
- proxy-mapped
- Background dataset
- trimethylamine
- Notes
- 1.5% quencher
- Uncertainty
- -66.7% / +33.3% around the published quantity. The bounds themselves ship with the dataset on Circa.
- Unit
- kg
Surfactants and additives Materialkg · -80% / +100%
- Derivation basis
-
- The model specifies this input from the production route, either from the chemistry of the reaction or from the allowance the route sets for it. It also states the excess the route uses and the share it recovers for reuse.
The sources for this row are listed below.
- Source citations (dataset-level)
-
- JSR, TOK product information
- SPIE Proceedings on lithography materials
- Background data
- proxy-mapped
- Background dataset
- non-ionic surfactant
- Notes
- 0.5% minor components; fluorinated surfactant, no discrete ecoinvent equivalent. Proxied to the generic non-ionic surfactant market. PFAS caveat: the constituent is a FLUORINATED surfactant with potential PFAS-class persistence and toxicity, and the generic surfactant proxy captures its mass and production chemistry but NOT that hazard profile. The flow is therefore documented here rather than silently genericized - a user screening for PFAS should treat this row as a flag, not as a characterised result. Downstream mass is microgram-scale per wafer.
- Uncertainty
- -80% / +100% around the published quantity. The bounds themselves ship with the dataset on Circa.
- Unit
- kg
Filtration media (cartridges) Materialkg · -50% / +100%
- Derivation basis
-
- The model specifies this input from the production route, either from the chemistry of the reaction or from the allowance the route sets for it. It also states the excess the route uses and the share it recovers for reuse.
The sources for this row are listed below.
- Source citations (dataset-level)
-
- JSR, TOK product information
- SPIE Proceedings on lithography materials
- Background data
- proxy-mapped
- Background dataset
- polypropylene, granulate
- Notes
- Sub-micron filter cartridges consumed by the multi-stage filtration the electronic grade requires.
- Uncertainty
- -50% / +100% around the published quantity. The bounds themselves ship with the dataset on Circa.
- Unit
- kg
Electricity, polymer synthesis, Global (GLO) ElectricitykWh · -40% / +60%
- Derivation basis
-
- Energy demand specified by the model.
No source is attached to this row.
- Source citations
- Not stated
- Background data
- ecoinvent 3.12
- Background dataset
- electricity, medium voltage
- Notes
- Solution polymerization. Proxy estimate
- Uncertainty
- -40% / +60% around the published quantity. The bounds themselves ship with the dataset on Circa.
- Unit
- kWh
Electricity, PAG synthesis, Global (GLO) ElectricitykWh · -66.7% / +100%
- Derivation basis
-
- Energy demand specified by the model.
No source is attached to this row.
- Source citations
- Not stated
- Background data
- ecoinvent 3.12
- Background dataset
- electricity, medium voltage
- Notes
- Multi-step specialty synthesis
- Uncertainty
- -66.7% / +100% around the published quantity. The bounds themselves ship with the dataset on Circa.
- Unit
- kWh
Electricity, blending and QC, Global (GLO) ElectricitykWh · -37.5% / +66.7%
- Derivation basis
-
- Energy demand specified by the model.
No source is attached to this row.
- Source citations
- Not stated
- Background data
- ecoinvent 3.12
- Background dataset
- electricity, medium voltage
- Notes
- Mixing, filtration, particle QC
- Uncertainty
- -37.5% / +66.7% around the published quantity. The bounds themselves ship with the dataset on Circa.
- Unit
- kWh
Fresh water WaterL · -33.3% / +66.7%
- Derivation basis
-
- Water demand specified by the model.
No source is attached to this row.
- Source citations
- Not stated
- Background data
- ecoinvent 3.12
- Background dataset
- tap water
- Uncertainty
- -33.3% / +66.7% around the published quantity. The bounds themselves ship with the dataset on Circa.
- Unit
- L
Outputs and waste
Wastewater to treatment WastewaterL · -50% / +100%
- Derivation basis
-
- The model estimates this flow from the mass balance of the operation and from the share of material the operation loses.
The sources below are this dataset's own bibliography. They are not tied to this row.
- Source citations (dataset-level)
- Inherited from this dataset's own bibliography, not tied to this row:
- JSR, TOK product information
- SPIE Proceedings on lithography materials
- Background data
- carried, no background dataset
- Background dataset
- wastewater, average
- Uncertainty
- -50% / +100% around the published quantity. The bounds themselves ship with the dataset on Circa.
- Unit
- L
Spent filter media Solid wasteg · -50% / +100%
- Derivation basis
-
- The model estimates this flow from the mass balance of the operation and from the share of material the operation loses.
The sources below are this dataset's own bibliography. They are not tied to this row.
- Source citations (dataset-level)
- Inherited from this dataset's own bibliography, not tied to this row:
- JSR, TOK product information
- SPIE Proceedings on lithography materials
- Background data
- ecoinvent 3.12 treatment route
- Background dataset
- treatment of hazardous waste, hazardous waste incineration, with energy recovery
- Notes
- Cartridges from the multi-stage filtration, loaded with resist solids including the fluorinated photoacid generator, so they are incinerated as hazardous waste. The matching cartridge purchase is on the input side.
- Uncertainty
- -50% / +100% around the published quantity. The bounds themselves ship with the dataset on Circa.
- Unit
- g
Off-spec photoresist Solid wasteg · -50% / +100%
- Derivation basis
-
- The model estimates this flow from the mass balance of the operation and from the share of material the operation loses.
The sources below are this dataset's own bibliography. They are not tied to this row.
- Source citations (dataset-level)
- Inherited from this dataset's own bibliography, not tied to this row:
- JSR, TOK product information
- SPIE Proceedings on lithography materials
- Background data
- ecoinvent 3.12 treatment route
- Background dataset
- treatment of hazardous waste, hazardous waste incineration, with energy recovery
- Notes
- QC rejects; contains fluorinated compounds
- Uncertainty
- -50% / +100% around the published quantity. The bounds themselves ship with the dataset on Circa.
- Unit
- g
Polymer synthesis waste Solid wasteg · -50% / +87.5%
- Derivation basis
-
- The model estimates this flow from the mass balance of the operation and from the share of material the operation loses.
The sources below are this dataset's own bibliography. They are not tied to this row.
- Source citations (dataset-level)
- Inherited from this dataset's own bibliography, not tied to this row:
- JSR, TOK product information
- SPIE Proceedings on lithography materials
- Background data
- ecoinvent 3.12 treatment route
- Background dataset
- treatment of hazardous waste, hazardous waste incineration, with energy recovery
- Notes
- Heavy ends, oligomers
- Uncertainty
- -50% / +87.5% around the published quantity. The bounds themselves ship with the dataset on Circa.
- Unit
- g
Container-rinse residue (resist solids) Solid wasteg · -33.3% / +66.7%
- Derivation basis
-
- The model estimates this flow from the mass balance of the operation and from the share of material the operation loses.
The sources below are this dataset's own bibliography. They are not tied to this row.
- Source citations (dataset-level)
- Inherited from this dataset's own bibliography, not tied to this row:
- JSR, TOK product information
- SPIE Proceedings on lithography materials
- Background data
- ecoinvent 3.12 treatment route
- Background dataset
- treatment of hazardous waste, hazardous waste incineration, with energy recovery
- Notes
- Resist left in shipping containers and washed out between fills. It is formulated resist rather than packaging material, so it is funded by the ingredient gross-up and classed with the other resist-bearing wastes. Reusable containers themselves stay outside the boundary, as on the sibling developer dataset.
- Uncertainty
- -33.3% / +66.7% around the published quantity. The bounds themselves ship with the dataset on Circa.
- Unit
- g
Emissions to air
2 elementary flows released to air by this dataset's own operations. Quantities are not published; they ship with the dataset on Circa.
PGMEA (fugitive) Emission to airg
- Derivation basis
-
- The model estimates this flow from the mass balance of the operation and from the share of material the operation loses.
The sources below are this dataset's own bibliography. They are not tied to this row.
- Source citations (dataset-level)
- Inherited from this dataset's own bibliography, not tied to this row:
- JSR, TOK product information
- SPIE Proceedings on lithography materials
- Compartment
- Air (non-urban air or from high stacks)
- Formula
- C6H12O3
- CAS number
- 108-65-6
- ecoinvent 3.12 elementary flow
- NMVOC, non-methane volatile organic compounds
- Notes
- VOC; fugitive from blending
- Uncertainty
- A minimum-maximum range is defined for this flow. Bounds ship with the dataset on Circa.
- Unit
- g
VOCs (miscellaneous) Emission to airg
- Derivation basis
-
- The model estimates this flow from the mass balance of the operation and from the share of material the operation loses.
The sources below are this dataset's own bibliography. They are not tied to this row.
- Source citations (dataset-level)
- Inherited from this dataset's own bibliography, not tied to this row:
- JSR, TOK product information
- SPIE Proceedings on lithography materials
- Compartment
- Air (non-urban air or from high stacks)
- ecoinvent 3.12 elementary flow
- NMVOC, non-methane volatile organic compounds
- Notes
- From polymer synthesis and solvents
- Uncertainty
- A minimum-maximum range is defined for this flow. Bounds ship with the dataset on Circa.
- Unit
- g
Emissions to water
1 elementary flow released to water by this dataset's own operations. Quantities are not published; they ship with the dataset on Circa.
Organic solvents (trace) Emission to waterg
- Derivation basis
-
- The model estimates this flow from the mass balance of the operation and from the share of material the operation loses.
The sources below are this dataset's own bibliography. They are not tied to this row.
- Source citations (dataset-level)
- Inherited from this dataset's own bibliography, not tied to this row:
- JSR, TOK product information
- SPIE Proceedings on lithography materials
- Compartment
- Water (surface water)
- ecoinvent 3.12 elementary flow
- COD, Chemical Oxygen Demand
- Notes
- PGMEA and polymer solvent traces
- Uncertainty
- A minimum-maximum range is defined for this flow. Bounds ship with the dataset on Circa.
- Unit
- g
Flows not quantified
No flows are recorded for this dataset without a quantity.
The flows above are this dataset's own records. What follows are the scope rules set once for the whole database in the methodology report, repeated here so every dataset page carries them.
Boundary declared by this dataset
Gate-to-gate blending; PGMEA from upstream, specialty chemicals proxied
Database-wide boundary policy — applies to every REEL dataset
These boundaries are set once for the whole database, in Chapter 2 of the methodology report, and apply to this dataset wherever they are relevant to it. The excluded flows listed above are specific to this dataset.
- Use phase
- Product operation is outside the cradle-to-gate scope.
- End-of-life treatment
- Recycling and disposal are outside the cradle-to-gate scope.
- Distribution and retail
- The gate is a finished component ready for integration into a higher-level assembly.
- Inbound transport of raw materials
- Transport of purchased raw materials to the manufacturing facility is already inside the upstream "market for" datasets that users link to a background database, so it is not modelled a second time here. This does not cover freight between REEL production stages, which is modelled where a dataset authors it.
- Returnable shipping containers
- Where freight between production stages is modelled, the mass moved is the product itself. The shipping container (FOSB, SEMI M31) is returnable capital equipment whose per-trip share is unsourced, so its tare is excluded from the transport effort.
- Photomask fabrication
- A mask set's embodied burden is amortised across a high-volume production run and is not attributed per wafer. Users assessing low-volume production should add mask fabrication separately; the methodology report gives the basis for the exclusion.
- Employee transport, administration and R&D overhead
- Employee transportation, facility administration and R&D/pilot-production overhead are outside scope.
- Capital goods
- Manufacturing equipment, cleanroom construction and facility infrastructure are excluded, on the grounds of absent public data on equipment embodied energy, uncertainty in equipment lifetime and allocation, common practice in electronics LCA, and a focus on the operational inventory. Future versions may include capital goods when sufficient public data becomes available.
- Precious metal recovery credits
- Scrap recovery credits for precious metals are excluded pending data availability.
- Wafer reclaim
- Test wafers and scrap are outside the system boundary.
Inside the boundary, linked rather than modelled
- Silicon ingot growth and wafer slicing
- Inside the cradle-to-gate scope, but treated as upstream material inputs linked to background databases rather than modelled as REEL processes.
- Freight between production stages
- Where a dataset's product moves between REEL production stages - wafer fabrication to the packaging site, for example - that leg is authored as a transport service and linked to an ecoinvent freight activity. It is measured as a transport effort in tonne-kilometres, not as a mass. Route distances are authored per route class with a stated band; a lower bound of zero is a modelling statement that the two sites can be co-located, not a missing value.
Cut-off criteria
A flow is excluded from a process inventory when it contributes less than 1 % of the total mass of inputs to that unit process, or less than 1 % of its total energy input. The denominator is total process inputs, not product mass. That distinction matters in semiconductor manufacturing, where the input mass of water, chemicals and gases greatly exceeds the product mass, so the threshold removes only genuinely minor flows.
Included regardless of the cut-off
- Perfluorocarbons (CF4, C2F6, SF6, NF3) - high GWP, EPA regulated
- Heavy metals (Pb, Cd, Hg, Cr(VI)) - RoHS regulated, high toxicity
- Volatile organics (photoresist solvents, PGMEA) - air quality
- Precious metals (Au, Ag, Pd, Pt) - high embodied impacts
- Ozone-depleting substances (legacy CFCs, HCFCs) - Montreal Protocol
Not stated