Skip to main content

Overview

General comment

Not stated

Technology
Formulation blending of polymer resin, photoacid generator, quencher and additives into PGMEA carrier solvent
Geography
Global

System boundary

System boundary - ArF Photoresist (193nm)System boundary figure: identity, gate in, entering flows, the dashed system boundary and the unit processes inside it, the reference product, emissions and waste, and below it the flows that are recorded but not quantified. No inventory quantities.ArF Photoresist (193nm)DECLARED BOUNDARYGate-to-gate blending; PGMEA from upstream,specialty chemicals proxiedENTERING FLOWSElectricityWaterMaterialsSYSTEM BOUNDARYAGGREGATED PRODUCTION MODELModelled as one production operation.This dataset models the production of this material as a single aggregated operation at the supplier plant.Its inputs and outputs are recorded against that operation rather than a step-by-step recipe.REFERENCE PRODUCTArF Photoresist (193nm)Not stated in the dataset recordEMISSIONS AND WASTEEmissions to airEmissions to waterWaste routesRECORDED BUT NOT QUANTIFIEDExclusions not yet characterisedNo exclusion record was found for this datasetNOT CHARACTERISEDsystem boundaryreference flowentering flowemission / waste

The figure groups this dataset's unit processes by class. It is not a count of manufacturing steps — each process runs over as many passes as the flow requires, and those pass counts ship with the dataset.

Download this figure (SVG)

Data quality and references

Composite DQI 2.1 Good
Reliability
5.0
Completeness
1.0
Temporal
1.0
Geographic
2.0
Technological
4.0

Pedigree scores follow the ecoinvent data-quality matrix: 1 is the best attainable, 5 the weakest. The composite is their aggregate.

Sampling procedure
Resist supplier product information, lithography-conference proceedings, and photoresist chemistry literature. Commercial formulations are proprietary, so the component split is assembled from published composition ranges; the solvent links a published third-party production dataset and the specialty polymer, photoacid generator, and fluorinated surfactant are represented by chemically similar proxies.
Coverage status
Complete
Pedigree-scored source files
Not stated
Dataset sources
  • Photoresist chemistry literature
  • JSR, TOK product information
  • SPIE Proceedings on lithography materials

Technosphere inputs

10 flows. Quantities are not published; they ship with the dataset on Circa.

PGMEA Materialkg · -5.9% / +3.5%
Derivation basis
  • The model specifies this input from the production route, either from the chemistry of the reaction or from the allowance the route sets for it. It also states the excess the route uses and the share it recovers for reuse.
  • No corresponding ecoinvent dataset or flow was identified for this entry; its background is carried by the mapped dataset named on this row

The sources for this row are listed below.

Source citations (dataset-level)
  • JSR, TOK product information
  • SPIE Proceedings on lithography materials
Background data
CarbonMinds
Background dataset
propylene glycol methyl ether acetate (PGMEA)
Notes
Primary component by weight
Uncertainty
-5.9% / +3.5% around the published quantity. The bounds themselves ship with the dataset on Circa.
Unit
kg
Acrylic copolymer (proxy) Materialkg · -20% / +50%
Derivation basis
  • The model specifies this input from the production route, either from the chemistry of the reaction or from the allowance the route sets for it. It also states the excess the route uses and the share it recovers for reuse.

The sources for this row are listed below.

Source citations (dataset-level)
  • JSR, TOK product information
  • SPIE Proceedings on lithography materials
Background data
proxy-mapped
Background dataset
methyl methacrylate
Notes
10% polymer solids
Uncertainty
-20% / +50% around the published quantity. The bounds themselves ship with the dataset on Circa.
Unit
kg
Photoacid generator (PAG) Materialkg · -33.3% / +66.7%
Derivation basis
  • The model specifies this input from the production route, either from the chemistry of the reaction or from the allowance the route sets for it. It also states the excess the route uses and the share it recovers for reuse.

The sources for this row are listed below.

Source citations (dataset-level)
  • JSR, TOK product information
  • SPIE Proceedings on lithography materials
Background data
proxy-mapped
Background dataset
chemical, organic, unspecified
Notes
3% PAG
Uncertainty
-33.3% / +66.7% around the published quantity. The bounds themselves ship with the dataset on Circa.
Unit
kg
Amine base quencher Materialkg · -66.7% / +33.3%
Derivation basis
  • The model specifies this input from the production route, either from the chemistry of the reaction or from the allowance the route sets for it. It also states the excess the route uses and the share it recovers for reuse.

The sources for this row are listed below.

Source citations (dataset-level)
  • JSR, TOK product information
  • SPIE Proceedings on lithography materials
Background data
proxy-mapped
Background dataset
trimethylamine
Notes
1.5% quencher
Uncertainty
-66.7% / +33.3% around the published quantity. The bounds themselves ship with the dataset on Circa.
Unit
kg
Surfactants and additives Materialkg · -80% / +100%
Derivation basis
  • The model specifies this input from the production route, either from the chemistry of the reaction or from the allowance the route sets for it. It also states the excess the route uses and the share it recovers for reuse.

The sources for this row are listed below.

Source citations (dataset-level)
  • JSR, TOK product information
  • SPIE Proceedings on lithography materials
Background data
proxy-mapped
Background dataset
non-ionic surfactant
Notes
0.5% minor components; fluorinated surfactant, no discrete ecoinvent equivalent. Proxied to the generic non-ionic surfactant market. PFAS caveat: the constituent is a FLUORINATED surfactant with potential PFAS-class persistence and toxicity, and the generic surfactant proxy captures its mass and production chemistry but NOT that hazard profile. The flow is therefore documented here rather than silently genericized - a user screening for PFAS should treat this row as a flag, not as a characterised result. Downstream mass is microgram-scale per wafer.
Uncertainty
-80% / +100% around the published quantity. The bounds themselves ship with the dataset on Circa.
Unit
kg
Filtration media (cartridges) Materialkg · -50% / +100%
Derivation basis
  • The model specifies this input from the production route, either from the chemistry of the reaction or from the allowance the route sets for it. It also states the excess the route uses and the share it recovers for reuse.

The sources for this row are listed below.

Source citations (dataset-level)
  • JSR, TOK product information
  • SPIE Proceedings on lithography materials
Background data
proxy-mapped
Background dataset
polypropylene, granulate
Notes
Sub-micron filter cartridges consumed by the multi-stage filtration the electronic grade requires.
Uncertainty
-50% / +100% around the published quantity. The bounds themselves ship with the dataset on Circa.
Unit
kg
Electricity, polymer synthesis, Global (GLO) ElectricitykWh · -40% / +60%
Derivation basis
  • Energy demand specified by the model.

No source is attached to this row.

Source citations
Not stated
Background data
ecoinvent 3.12
Background dataset
electricity, medium voltage
Notes
Solution polymerization. Proxy estimate
Uncertainty
-40% / +60% around the published quantity. The bounds themselves ship with the dataset on Circa.
Unit
kWh
Electricity, PAG synthesis, Global (GLO) ElectricitykWh · -66.7% / +100%
Derivation basis
  • Energy demand specified by the model.

No source is attached to this row.

Source citations
Not stated
Background data
ecoinvent 3.12
Background dataset
electricity, medium voltage
Notes
Multi-step specialty synthesis
Uncertainty
-66.7% / +100% around the published quantity. The bounds themselves ship with the dataset on Circa.
Unit
kWh
Electricity, blending and QC, Global (GLO) ElectricitykWh · -37.5% / +66.7%
Derivation basis
  • Energy demand specified by the model.

No source is attached to this row.

Source citations
Not stated
Background data
ecoinvent 3.12
Background dataset
electricity, medium voltage
Notes
Mixing, filtration, particle QC
Uncertainty
-37.5% / +66.7% around the published quantity. The bounds themselves ship with the dataset on Circa.
Unit
kWh
Fresh water WaterL · -33.3% / +66.7%
Derivation basis
  • Water demand specified by the model.

No source is attached to this row.

Source citations
Not stated
Background data
ecoinvent 3.12
Background dataset
tap water
Uncertainty
-33.3% / +66.7% around the published quantity. The bounds themselves ship with the dataset on Circa.
Unit
L

Outputs and waste

Wastewater to treatment WastewaterL · -50% / +100%
Derivation basis
  • The model estimates this flow from the mass balance of the operation and from the share of material the operation loses.

The sources below are this dataset's own bibliography. They are not tied to this row.

Source citations (dataset-level)
Inherited from this dataset's own bibliography, not tied to this row:
  • JSR, TOK product information
  • SPIE Proceedings on lithography materials
Background data
carried, no background dataset
Background dataset
wastewater, average
Uncertainty
-50% / +100% around the published quantity. The bounds themselves ship with the dataset on Circa.
Unit
L
Spent filter media Solid wasteg · -50% / +100%
Derivation basis
  • The model estimates this flow from the mass balance of the operation and from the share of material the operation loses.

The sources below are this dataset's own bibliography. They are not tied to this row.

Source citations (dataset-level)
Inherited from this dataset's own bibliography, not tied to this row:
  • JSR, TOK product information
  • SPIE Proceedings on lithography materials
Background data
ecoinvent 3.12 treatment route
Background dataset
treatment of hazardous waste, hazardous waste incineration, with energy recovery
Notes
Cartridges from the multi-stage filtration, loaded with resist solids including the fluorinated photoacid generator, so they are incinerated as hazardous waste. The matching cartridge purchase is on the input side.
Uncertainty
-50% / +100% around the published quantity. The bounds themselves ship with the dataset on Circa.
Unit
g
Off-spec photoresist Solid wasteg · -50% / +100%
Derivation basis
  • The model estimates this flow from the mass balance of the operation and from the share of material the operation loses.

The sources below are this dataset's own bibliography. They are not tied to this row.

Source citations (dataset-level)
Inherited from this dataset's own bibliography, not tied to this row:
  • JSR, TOK product information
  • SPIE Proceedings on lithography materials
Background data
ecoinvent 3.12 treatment route
Background dataset
treatment of hazardous waste, hazardous waste incineration, with energy recovery
Notes
QC rejects; contains fluorinated compounds
Uncertainty
-50% / +100% around the published quantity. The bounds themselves ship with the dataset on Circa.
Unit
g
Polymer synthesis waste Solid wasteg · -50% / +87.5%
Derivation basis
  • The model estimates this flow from the mass balance of the operation and from the share of material the operation loses.

The sources below are this dataset's own bibliography. They are not tied to this row.

Source citations (dataset-level)
Inherited from this dataset's own bibliography, not tied to this row:
  • JSR, TOK product information
  • SPIE Proceedings on lithography materials
Background data
ecoinvent 3.12 treatment route
Background dataset
treatment of hazardous waste, hazardous waste incineration, with energy recovery
Notes
Heavy ends, oligomers
Uncertainty
-50% / +87.5% around the published quantity. The bounds themselves ship with the dataset on Circa.
Unit
g
Container-rinse residue (resist solids) Solid wasteg · -33.3% / +66.7%
Derivation basis
  • The model estimates this flow from the mass balance of the operation and from the share of material the operation loses.

The sources below are this dataset's own bibliography. They are not tied to this row.

Source citations (dataset-level)
Inherited from this dataset's own bibliography, not tied to this row:
  • JSR, TOK product information
  • SPIE Proceedings on lithography materials
Background data
ecoinvent 3.12 treatment route
Background dataset
treatment of hazardous waste, hazardous waste incineration, with energy recovery
Notes
Resist left in shipping containers and washed out between fills. It is formulated resist rather than packaging material, so it is funded by the ingredient gross-up and classed with the other resist-bearing wastes. Reusable containers themselves stay outside the boundary, as on the sibling developer dataset.
Uncertainty
-33.3% / +66.7% around the published quantity. The bounds themselves ship with the dataset on Circa.
Unit
g

Emissions to air

2 elementary flows released to air by this dataset's own operations. Quantities are not published; they ship with the dataset on Circa.

PGMEA (fugitive) Emission to airg
Derivation basis
  • The model estimates this flow from the mass balance of the operation and from the share of material the operation loses.

The sources below are this dataset's own bibliography. They are not tied to this row.

Source citations (dataset-level)
Inherited from this dataset's own bibliography, not tied to this row:
  • JSR, TOK product information
  • SPIE Proceedings on lithography materials
Compartment
Air (non-urban air or from high stacks)
Formula
C6H12O3
CAS number
108-65-6
ecoinvent 3.12 elementary flow
NMVOC, non-methane volatile organic compounds
Notes
VOC; fugitive from blending
Uncertainty
A minimum-maximum range is defined for this flow. Bounds ship with the dataset on Circa.
Unit
g
VOCs (miscellaneous) Emission to airg
Derivation basis
  • The model estimates this flow from the mass balance of the operation and from the share of material the operation loses.

The sources below are this dataset's own bibliography. They are not tied to this row.

Source citations (dataset-level)
Inherited from this dataset's own bibliography, not tied to this row:
  • JSR, TOK product information
  • SPIE Proceedings on lithography materials
Compartment
Air (non-urban air or from high stacks)
ecoinvent 3.12 elementary flow
NMVOC, non-methane volatile organic compounds
Notes
From polymer synthesis and solvents
Uncertainty
A minimum-maximum range is defined for this flow. Bounds ship with the dataset on Circa.
Unit
g

Emissions to water

1 elementary flow released to water by this dataset's own operations. Quantities are not published; they ship with the dataset on Circa.

Organic solvents (trace) Emission to waterg
Derivation basis
  • The model estimates this flow from the mass balance of the operation and from the share of material the operation loses.

The sources below are this dataset's own bibliography. They are not tied to this row.

Source citations (dataset-level)
Inherited from this dataset's own bibliography, not tied to this row:
  • JSR, TOK product information
  • SPIE Proceedings on lithography materials
Compartment
Water (surface water)
ecoinvent 3.12 elementary flow
COD, Chemical Oxygen Demand
Notes
PGMEA and polymer solvent traces
Uncertainty
A minimum-maximum range is defined for this flow. Bounds ship with the dataset on Circa.
Unit
g

Flows not quantified

No flows are recorded for this dataset without a quantity.

The flows above are this dataset's own records. What follows are the scope rules set once for the whole database in the methodology report, repeated here so every dataset page carries them.

Boundary declared by this dataset

Gate-to-gate blending; PGMEA from upstream, specialty chemicals proxied

Database-wide boundary policy — applies to every REEL dataset

These boundaries are set once for the whole database, in Chapter 2 of the methodology report, and apply to this dataset wherever they are relevant to it. The excluded flows listed above are specific to this dataset.

Use phase
Product operation is outside the cradle-to-gate scope.
End-of-life treatment
Recycling and disposal are outside the cradle-to-gate scope.
Distribution and retail
The gate is a finished component ready for integration into a higher-level assembly.
Inbound transport of raw materials
Transport of purchased raw materials to the manufacturing facility is already inside the upstream "market for" datasets that users link to a background database, so it is not modelled a second time here. This does not cover freight between REEL production stages, which is modelled where a dataset authors it.
Returnable shipping containers
Where freight between production stages is modelled, the mass moved is the product itself. The shipping container (FOSB, SEMI M31) is returnable capital equipment whose per-trip share is unsourced, so its tare is excluded from the transport effort.
Photomask fabrication
A mask set's embodied burden is amortised across a high-volume production run and is not attributed per wafer. Users assessing low-volume production should add mask fabrication separately; the methodology report gives the basis for the exclusion.
Employee transport, administration and R&D overhead
Employee transportation, facility administration and R&D/pilot-production overhead are outside scope.
Capital goods
Manufacturing equipment, cleanroom construction and facility infrastructure are excluded, on the grounds of absent public data on equipment embodied energy, uncertainty in equipment lifetime and allocation, common practice in electronics LCA, and a focus on the operational inventory. Future versions may include capital goods when sufficient public data becomes available.
Precious metal recovery credits
Scrap recovery credits for precious metals are excluded pending data availability.
Wafer reclaim
Test wafers and scrap are outside the system boundary.

Inside the boundary, linked rather than modelled

Silicon ingot growth and wafer slicing
Inside the cradle-to-gate scope, but treated as upstream material inputs linked to background databases rather than modelled as REEL processes.
Freight between production stages
Where a dataset's product moves between REEL production stages - wafer fabrication to the packaging site, for example - that leg is authored as a transport service and linked to an ecoinvent freight activity. It is measured as a transport effort in tonne-kilometres, not as a mass. Route distances are authored per route class with a stated band; a lower bound of zero is a modelling statement that the two sites can be co-located, not a missing value.

Cut-off criteria

A flow is excluded from a process inventory when it contributes less than 1 % of the total mass of inputs to that unit process, or less than 1 % of its total energy input. The denominator is total process inputs, not product mass. That distinction matters in semiconductor manufacturing, where the input mass of water, chemicals and gases greatly exceeds the product mass, so the threshold removes only genuinely minor flows.

Included regardless of the cut-off

  • Perfluorocarbons (CF4, C2F6, SF6, NF3) - high GWP, EPA regulated
  • Heavy metals (Pb, Cd, Hg, Cr(VI)) - RoHS regulated, high toxicity
  • Volatile organics (photoresist solvents, PGMEA) - air quality
  • Precious metals (Au, Ag, Pd, Pt) - high embodied impacts
  • Ozone-depleting substances (legacy CFCs, HCFCs) - Montreal Protocol