Overview
- Technology
- Electrolysis of hydrogen fluoride in potassium fluoride melt
- Geography
- Global
System boundary
The figure groups this dataset's unit processes by class. It is not a count of manufacturing steps — each process runs over as many passes as the flow requires, and those pass counts ship with the dataset.
Data quality and references
Pedigree scores follow the ecoinvent data-quality matrix: 1 is the best attainable, 5 the weakest. The composite is their aggregate.
- Sampling procedure
- Industrial-electrochemistry textbooks and chemical-technology reference works for cell design and operation, electrolysis-cell and hydrogen-fluoride-recovery patents, a peer-reviewed study of cell energy use, government emission factors for fugitive releases, and stoichiometric calculation over the electrolysis reaction
- Coverage status
- Partial
- Pedigree-scored source files
- Not stated
- Dataset sources
-
- Kirk-Othmer Encyclopedia of Chemical Technology - Fluorine
- Industrial Electrochemistry, Pletcher & Walsh
- Air Products fluorine production patents
- Stoichiometric calculation
- EPA emission factors
Technosphere inputs
6 flows. Quantities are not published; they ship with the dataset on Circa.
Hydrogen fluoride (HF) Materialkg · -3.6% / +9.1%
- Source citations
-
- essentialchemicalindustry.org (date not recorded). Essential Chemical Industry (CIEC, University of York) - Fluorine.
- sciencedirect.com (date not recorded). Gladyr E.M., Liventsova N.V., Liventsov S.N. & Egorova O.V. (2014) - Power-efficient mode of the electrolytic fluorine production process control, Procedia Chemistry 11:147-151 (ISIF 2014, Tomsk Polytechnic; doi:10.1016/j.proche.2014.11.026; open access CC BY-NC-ND 3.0).
- image-ppubs.uspto.gov (date not recorded). US 8,038,852 B2 - Fluorine gas generating apparatus (Toyo Tanso Co., Tojo et al., 2011). Patent.
- image-ppubs.uspto.gov (date not recorded). US 5,336,832 - Recovery of HF from hydrocarbon streams (Keller, Conoco Inc., 1994) - NaF-bed HF recovery, regeneration releases anhydrous HF. Patent.
- Background data
- ecoinvent 3.12
- Background dataset
- hydrogen fluoride
- Notes
- Anhydrous HF required; available in ecoinvent
- Uncertainty
- -3.6% / +9.1% around the published quantity. The bounds themselves ship with the dataset on Circa.
- Unit
- kg
Potassium fluoride (KF) makeup Materialkg · -50% / +100%
- Derivation basis
-
- The model specifies this input from the production route, either from the chemistry of the reaction or from the allowance the route sets for it. It also states the excess the route uses and the share it recovers for reuse.
The sources for this row are listed below.
- Source citations (dataset-level)
-
- Kirk-Othmer Encyclopedia of Chemical Technology - Fluorine
- Industrial Electrochemistry, Pletcher & Walsh
- Air Products fluorine production patents
- EPA emission factors
- Background data
- proxy-mapped
- Background dataset
- sodium fluoride
- Notes
- Trace makeup for electrolyte losses
- Uncertainty
- -50% / +100% around the published quantity. The bounds themselves ship with the dataset on Circa.
- Unit
- kg
Carbon anode Materialkg · -50% / +100%
- Derivation basis
-
- The model specifies this input from the production route, either from the chemistry of the reaction or from the allowance the route sets for it. It also states the excess the route uses and the share it recovers for reuse.
The sources for this row are listed below.
- Source citations (dataset-level)
-
- Kirk-Othmer Encyclopedia of Chemical Technology - Fluorine
- Industrial Electrochemistry, Pletcher & Walsh
- Air Products fluorine production patents
- EPA emission factors
- Background data
- ecoinvent 3.12
- Background dataset
- carbon black
- Notes
- Anode consumption due to fluorine attack
- Uncertainty
- -50% / +100% around the published quantity. The bounds themselves ship with the dataset on Circa.
- Unit
- kg
Hydrated lime (wastewater treatment) Materialkg · -51.4% / +151.4%
- Derivation basis
-
- The model specifies this input from the production route, either from the chemistry of the reaction or from the allowance the route sets for it. It also states the excess the route uses and the share it recovers for reuse.
The sources for this row are listed below.
- Source citations (dataset-level)
-
- Kirk-Othmer Encyclopedia of Chemical Technology - Fluorine
- Industrial Electrochemistry, Pletcher & Walsh
- Air Products fluorine production patents
- EPA emission factors
- Background data
- proxy-mapped
- Background dataset
- calcium carbonate, precipitated
- Notes
- Precipitant for the fluoride captured in the off-gas scrubber. It supplies the calcium in the calcium fluoride sludge this dataset ships.
- Uncertainty
- -51.4% / +151.4% around the published quantity. The bounds themselves ship with the dataset on Circa.
- Unit
- kg
Electricity, Global (GLO) ElectricitykWh · -23.1% / +38.5%
- Derivation basis
-
- Energy demand specified by the model.
No source is attached to this row.
- Source citations
- Not stated
- Background data
- ecoinvent 3.12
- Background dataset
- electricity, medium voltage
- Notes
- HF electrolysis
- Uncertainty
- -23.1% / +38.5% around the published quantity. The bounds themselves ship with the dataset on Circa.
- Unit
- kWh
Fresh water WaterL · -33.3% / +60%
- Derivation basis
-
- Water demand specified by the model.
No source is attached to this row.
- Source citations
- Not stated
- Background data
- ecoinvent 3.12
- Background dataset
- tap water
- Uncertainty
- -33.3% / +60% around the published quantity. The bounds themselves ship with the dataset on Circa.
- Unit
- L
Outputs and waste
Wastewater to treatment WastewaterL · -33.3% / +66.7%
- Derivation basis
-
- The model estimates this flow from the mass balance of the operation and from the share of material the operation loses.
The sources below are this dataset's own bibliography. They are not tied to this row.
- Source citations (dataset-level)
- Inherited from this dataset's own bibliography, not tied to this row:
- Kirk-Othmer Encyclopedia of Chemical Technology - Fluorine
- Industrial Electrochemistry, Pletcher & Walsh
- Air Products fluorine production patents
- EPA emission factors
- Background data
- carried, no background dataset
- Background dataset
- wastewater, average
- Uncertainty
- -33.3% / +66.7% around the published quantity. The bounds themselves ship with the dataset on Circa.
- Unit
- L
Spent electrolyte Solid wasteg · -50% / +100%
- Derivation basis
-
- The model estimates this flow from the mass balance of the operation and from the share of material the operation loses.
The sources below are this dataset's own bibliography. They are not tied to this row.
- Source citations (dataset-level)
- Inherited from this dataset's own bibliography, not tied to this row:
- Kirk-Othmer Encyclopedia of Chemical Technology - Fluorine
- Industrial Electrochemistry, Pletcher & Walsh
- Air Products fluorine production patents
- EPA emission factors
- Background data
- ecoinvent 3.12 treatment route
- Background dataset
- treatment of hazardous waste, underground deposit
- Notes
- Periodic replacement of the potassium bifluoride melt. An inorganic fluoride salt, routed to controlled inorganic disposal; incineration would burn nothing and destroy no fluoride.
- Uncertainty
- -50% / +100% around the published quantity. The bounds themselves ship with the dataset on Circa.
- Unit
- g
Calcium fluoride sludge Solid wasteg · -51.4% / +151.4%
- Derivation basis
-
- The model estimates this flow from the mass balance of the operation and from the share of material the operation loses.
The sources below are this dataset's own bibliography. They are not tied to this row.
- Source citations (dataset-level)
- Inherited from this dataset's own bibliography, not tied to this row:
- Kirk-Othmer Encyclopedia of Chemical Technology - Fluorine
- Industrial Electrochemistry, Pletcher & Walsh
- Air Products fluorine production patents
- EPA emission factors
- Background data
- ecoinvent 3.12 treatment route
- Background dataset
- treatment of inert waste, sanitary landfill
- Notes
- From lime precipitation of the scrubber water
- Uncertainty
- -51.4% / +151.4% around the published quantity. The bounds themselves ship with the dataset on Circa.
- Unit
- g
Spent carbon anode Solid wasteg
- Derivation basis
-
- The model estimates this flow from the mass balance of the operation and from the share of material the operation loses.
The sources below are this dataset's own bibliography. They are not tied to this row.
- Source citations (dataset-level)
- Inherited from this dataset's own bibliography, not tied to this row:
- Kirk-Othmer Encyclopedia of Chemical Technology - Fluorine
- Industrial Electrochemistry, Pletcher & Walsh
- Air Products fluorine production patents
- EPA emission factors
- Background data
- ecoinvent 3.12 treatment route
- Background dataset
- treatment of hazardous waste, underground deposit
- Notes
- Graphite anode consumed by fluorine attack, carrying a surface layer of carbon fluoride. Elemental carbon and an inorganic fluoride film, so it is classed and routed with the other inorganic residues rather than as an incinerable organic.
- Uncertainty
- No range defined.
- Unit
- g
Emissions to air
2 elementary flows released to air by this dataset's own operations. Quantities are not published; they ship with the dataset on Circa.
Hydrogen fluoride Emission to airg
- Derivation basis
-
- The model estimates this flow from the mass balance of the operation and from the share of material the operation loses.
No source is attached to this row.
- Source citations
- Not stated
- Compartment
- Air (non-urban air or from high stacks)
- Formula
- HF
- CAS number
- 7664-39-3
- ecoinvent 3.12 elementary flow
- Hydrogen fluoride
- Notes
- Fugitive from cell and handling; most captured in scrubber
- Uncertainty
- A minimum-maximum range is defined for this flow. Bounds ship with the dataset on Circa.
- Unit
- g
Fluorine Emission to airg
- Derivation basis
-
- The model estimates this flow from the mass balance of the operation and from the share of material the operation loses.
The sources below are this dataset's own bibliography. They are not tied to this row.
- Source citations (dataset-level)
- Inherited from this dataset's own bibliography, not tied to this row:
- Kirk-Othmer Encyclopedia of Chemical Technology - Fluorine
- Industrial Electrochemistry, Pletcher & Walsh
- Air Products fluorine production patents
- EPA emission factors
- Compartment
- Air (non-urban air or from high stacks)
- Formula
- F2
- CAS number
- 7782-41-4
- ecoinvent 3.12 elementary flow
- Fluorine
- Notes
- Minor fugitive losses; highly reactive, quickly reacts
- Uncertainty
- A minimum-maximum range is defined for this flow. Bounds ship with the dataset on Circa.
- Unit
- g
Emissions to water
1 elementary flow released to water by this dataset's own operations. Quantities are not published; they ship with the dataset on Circa.
Fluoride ion Emission to waterg
- Derivation basis
-
- The model estimates this flow from the mass balance of the operation and from the share of material the operation loses.
The sources below are this dataset's own bibliography. They are not tied to this row.
- Source citations (dataset-level)
- Inherited from this dataset's own bibliography, not tied to this row:
- Kirk-Othmer Encyclopedia of Chemical Technology - Fluorine
- Industrial Electrochemistry, Pletcher & Walsh
- Air Products fluorine production patents
- EPA emission factors
- Compartment
- Water (surface water)
- Formula
- F-
- CAS number
- 16984-48-8
- ecoinvent 3.12 elementary flow
- Fluoride
- Notes
- Dissolved fluoride remaining after lime precipitation. The bulk of the captured fluoride leaves as the calcium fluoride sludge instead.
- Uncertainty
- A minimum-maximum range is defined for this flow. Bounds ship with the dataset on Circa.
- Unit
- g
Flows not quantified
No flows are recorded for this dataset without a quantity.
Limitations and unquantified flows (2)
Limits this dataset declares about itself: first any limit stated in its own description, then any limit it declares flow by flow, grouped by channel. Each entry below is the model's own disclosure.
- A small share of the fluorine entering the cell is vented on the cathode side and is not carried by any output flow. It is the difference between the net hydrogen fluoride feed and the fluorine that reaches the product, the sludge, the effluent, the spent melt and the measured fugitives.
- The electrolyte make-up brings in more potassium than the spent-melt row carries out. The remainder leaves with the same cathode-side losses and is not separately represented.
The flows above are this dataset's own records. What follows are the scope rules set once for the whole database in the methodology report, repeated here so every dataset page carries them.
Boundary declared by this dataset
Gate-to-gate F2 electrolysis; HF from ecoinvent
Database-wide boundary policy — applies to every REEL dataset
These boundaries are set once for the whole database, in Chapter 2 of the methodology report, and apply to this dataset wherever they are relevant to it. The excluded flows listed above are specific to this dataset.
- Use phase
- Product operation is outside the cradle-to-gate scope.
- End-of-life treatment
- Recycling and disposal are outside the cradle-to-gate scope.
- Distribution and retail
- The gate is a finished component ready for integration into a higher-level assembly.
- Inbound transport of raw materials
- Transport of purchased raw materials to the manufacturing facility is already inside the upstream "market for" datasets that users link to a background database, so it is not modelled a second time here. This does not cover freight between REEL production stages, which is modelled where a dataset authors it.
- Returnable shipping containers
- Where freight between production stages is modelled, the mass moved is the product itself. The shipping container (FOSB, SEMI M31) is returnable capital equipment whose per-trip share is unsourced, so its tare is excluded from the transport effort.
- Photomask fabrication
- A mask set's embodied burden is amortised across a high-volume production run and is not attributed per wafer. Users assessing low-volume production should add mask fabrication separately; the methodology report gives the basis for the exclusion.
- Employee transport, administration and R&D overhead
- Employee transportation, facility administration and R&D/pilot-production overhead are outside scope.
- Capital goods
- Manufacturing equipment, cleanroom construction and facility infrastructure are excluded, on the grounds of absent public data on equipment embodied energy, uncertainty in equipment lifetime and allocation, common practice in electronics LCA, and a focus on the operational inventory. Future versions may include capital goods when sufficient public data becomes available.
- Precious metal recovery credits
- Scrap recovery credits for precious metals are excluded pending data availability.
- Wafer reclaim
- Test wafers and scrap are outside the system boundary.
Inside the boundary, linked rather than modelled
- Silicon ingot growth and wafer slicing
- Inside the cradle-to-gate scope, but treated as upstream material inputs linked to background databases rather than modelled as REEL processes.
- Freight between production stages
- Where a dataset's product moves between REEL production stages - wafer fabrication to the packaging site, for example - that leg is authored as a transport service and linked to an ecoinvent freight activity. It is measured as a transport effort in tonne-kilometres, not as a mass. Route distances are authored per route class with a stated band; a lower bound of zero is a modelling statement that the two sites can be co-located, not a missing value.
Cut-off criteria
A flow is excluded from a process inventory when it contributes less than 1 % of the total mass of inputs to that unit process, or less than 1 % of its total energy input. The denominator is total process inputs, not product mass. That distinction matters in semiconductor manufacturing, where the input mass of water, chemicals and gases greatly exceeds the product mass, so the threshold removes only genuinely minor flows.
Included regardless of the cut-off
- Perfluorocarbons (CF4, C2F6, SF6, NF3) - high GWP, EPA regulated
- Heavy metals (Pb, Cd, Hg, Cr(VI)) - RoHS regulated, high toxicity
- Volatile organics (photoresist solvents, PGMEA) - air quality
- Precious metals (Au, Ag, Pd, Pt) - high embodied impacts
- Ozone-depleting substances (legacy CFCs, HCFCs) - Montreal Protocol
Not stated