Overview
- Technology
- Precision Shunt Resistor, Thin Film Metal Alloy
- Geography
- Global average data from equipment vendor specifications and industry literature
System boundary
The figure groups this dataset's unit processes by class. It is not a count of manufacturing steps — each process runs over as many passes as the flow requires, and those pass counts ship with the dataset.
Data quality and references
Pedigree scores follow the ecoinvent data-quality matrix: 1 is the best attainable, 5 the weakest. The composite is their aggregate.
- Sampling procedure
- Component vendor specifications, industry literature
- Coverage status
- Partial
- Pedigree-scored source files
- 4 — the source records behind this dataset's manufacturing operations. Each carries the five pedigree axes above; the composite DQI aggregates them.
Technosphere inputs
6 flows. Quantities are not published; they ship with the dataset on Circa.
Electricity, China (CN) ElectricitykWh · -25.7% / +32.6%
- Derivation basis
-
- Calculated from equipment energy across all manufacturing operations. This model includes no facility support, so the total is the manufacturing operations alone.
No source is attached to this row.
- Source citations
- Not stated
- Background data
- ecoinvent 3.12
- Background dataset
- electricity, medium voltage
- Uncertainty
- -25.7% / +32.6% around the published quantity. The bounds themselves ship with the dataset on Circa.
- Unit
- kWh
Substrate Al2O3 Materialkg · -6.6% / +8.9%
- Derivation basis
-
- Calculated from per-operation consumption, operation counts, and manufacturing yield.
No source is attached to this row.
- Source citations
- Not stated
- Background data
- proxy-mapped
- Background dataset
- aluminium oxide, metallurgical
- Notes
- Purchased input grossed to fund the authored process loss booked as Substrate Scrap (mass-closure funding; the retained mass is the product-side figure).
- Uncertainty
- -6.6% / +8.9% around the published quantity. The bounds themselves ship with the dataset on Circa.
- Unit
- kg
Copper, cathode Materialkg · -5.5% / +9.3%
- Derivation basis
-
- Calculated from per-operation consumption, operation counts, and manufacturing yield.
No source is attached to this row.
- Source citations
- Not stated
- Background data
- ecoinvent 3.12
- Background dataset
- copper, cathode
- Notes
- From Resistive Alloy (84.0% copper). Manganin matrix metal. Purchased input grossed to fund the authored process loss booked as PVD Targets, Etch Residue (mass-closure funding; the retained mass is the product-side figure).
- Uncertainty
- -5.5% / +9.3% around the published quantity. The bounds themselves ship with the dataset on Circa.
- Unit
- kg
Nickel, class 1 Materialkg · -5.5% / +9.3%
- Derivation basis
-
- Calculated from per-operation consumption, operation counts, and manufacturing yield.
No source is attached to this row.
- Source citations
- Not stated
- Background data
- ecoinvent 3.12
- Background dataset
- nickel, class 1
- Notes
- From Resistive Alloy (4.0% nickel). Manganin TCR-trim addition. Purchased input grossed to fund the authored process loss booked as PVD Targets, Etch Residue (mass-closure funding; the retained mass is the product-side figure).
- Uncertainty
- -5.5% / +9.3% around the published quantity. The bounds themselves ship with the dataset on Circa.
- Unit
- kg
Termination Cu Materialkg
- Derivation basis
-
- Calculated from per-operation consumption, operation counts, and manufacturing yield.
No source is attached to this row.
- Source citations
- Not stated
- Background data
- ecoinvent 3.12
- Background dataset
- copper, cathode
- Uncertainty
- No range defined.
- Unit
- kg
Ni Sn Plating Materialkg · -3.2% / +4.5%
- Derivation basis
-
- Calculated from per-operation consumption, operation counts, and manufacturing yield.
No source is attached to this row.
- Source citations
- Not stated
- Background data
- ecoinvent 3.12
- Background dataset
- nickel, class 1
- Notes
- Purchased input grossed to fund the authored process loss booked as Ni Sn Plating Rinse Sludge (mass-closure funding; the retained mass is the product-side figure).
- Uncertainty
- -3.2% / +4.5% around the published quantity. The bounds themselves ship with the dataset on Circa.
- Unit
- kg
Outputs and waste
Substrate Scrap Solid wasteg · -40.5% / +54.8%
- Derivation basis
-
- Calculated from the mass balance of spent materials and consumables, with treatment selected from the waste classification.
No source is attached to this row.
- Source citations
- Not stated
- Background data
- ecoinvent 3.12 treatment route
- Background dataset
- treatment of inert waste, sanitary landfill
- Uncertainty
- -40.5% / +54.8% around the published quantity. The bounds themselves ship with the dataset on Circa.
- Unit
- g
PVD Targets Solid wasteg · -41.2% / +58.8%
- Derivation basis
-
- Calculated from the mass balance of spent materials and consumables, with treatment selected from the waste classification.
No source is attached to this row.
- Source citations
- Not stated
- Background data
- ecoinvent 3.12 treatment route
- Background dataset
- treatment of inert waste, sanitary landfill
- Uncertainty
- -41.2% / +58.8% around the published quantity. The bounds themselves ship with the dataset on Circa.
- Unit
- g
Etch Residue Solid wasteg · -30% / +70%
- Derivation basis
-
- Calculated from the mass balance of spent materials and consumables, with treatment selected from the waste classification.
No source is attached to this row.
- Source citations
- Not stated
- Background data
- ecoinvent 3.12 treatment route
- Background dataset
- treatment of inert waste, sanitary landfill
- Uncertainty
- -30% / +70% around the published quantity. The bounds themselves ship with the dataset on Circa.
- Unit
- g
Stripped photoresist Solid wasteg · -40% / +60%
- Derivation basis
-
- Calculated from the mass balance of spent materials and consumables, with treatment selected from the waste classification.
No source is attached to this row.
- Source citations
- Not stated
- Background data
- ecoinvent 3.12 treatment route
- Background dataset
- treatment of hazardous waste, hazardous waste incineration, with energy recovery
- Uncertainty
- -40% / +60% around the published quantity. The bounds themselves ship with the dataset on Circa.
- Unit
- g
Ni Sn Plating Rinse Sludge Solid wasteg · -46.7% / +66.7%
- Derivation basis
-
- Calculated from the mass balance of spent materials and consumables, with treatment selected from the waste classification.
No source is attached to this row.
- Source citations
- Not stated
- Background data
- ecoinvent 3.12 treatment route
- Background dataset
- treatment of hazardous waste, underground deposit
- Uncertainty
- -46.7% / +66.7% around the published quantity. The bounds themselves ship with the dataset on Circa.
- Unit
- g
Rejected Components Solid wastekg
- Derivation basis
-
- Calculated from the mass balance of spent materials and consumables, with treatment selected from the waste classification.
No source is attached to this row.
- Source citations
- Not stated
- Background data
- ecoinvent 3.12 treatment route
- Background dataset
- treatment of inert waste, sanitary landfill
- Notes
- Calculated reject material after accounting for the model's declared 97% manufacturing yield, applied to the material quantity this row is taken from.
- Uncertainty
- No range defined.
- Unit
- kg
Emissions to air
No emissions to air are recorded at this level.
Emissions to water
No emissions to water are recorded at this level.
Flows not quantified
1 flow is recorded for this dataset but carries no quantity — cut off below the significance threshold, or with no background dataset available. It remains inside the declared system boundary; each is listed with its reason.
Cut off - below the significance threshold (1)
Manganese (alloying element) Materialkg
- Derivation basis
-
- Calculated from per-operation consumption, operation counts, and manufacturing yield.
No source is attached to this row.
- Source citations
- Not stated
- Background data
- cut off
- Background dataset
- Not applicable: this flow is not quantified in the inventory.
- Notes
- From Resistive Alloy (12.0% manganese)
- Reason
- Manganese metal, recorded at its authored mass. The mapping carries no manganese-metal production dataset (only oxides and salts), so the upstream burden is left unlinked rather than proxied to a manganese compound with a different production route.
- Uncertainty
- No range defined.
- Unit
- kg
Limitations and unquantified flows (1)
Limits this dataset declares about itself: first any limit stated in its own description, then any limit it declares flow by flow, grouped by channel. Each entry below is the model's own disclosure.
- Stripped photoresist leaves the boundary as waste but is not funded by any material input on this bill; see that row for the quantity. Spent photoresist from the thin-film patterning step. No photoresist purchase is booked on this bill and no donor quantifies one for this process, so the residue is carried as a declared open mass.
The flows above are this dataset's own records. What follows are the scope rules set once for the whole database in the methodology report, repeated here so every dataset page carries them.
Database-wide boundary policy — applies to every REEL dataset
These boundaries are set once for the whole database, in Chapter 2 of the methodology report, and apply to this dataset wherever they are relevant to it. The excluded flows listed above are specific to this dataset.
- Use phase
- Product operation is outside the cradle-to-gate scope.
- End-of-life treatment
- Recycling and disposal are outside the cradle-to-gate scope.
- Distribution and retail
- The gate is a finished component ready for integration into a higher-level assembly.
- Inbound transport of raw materials
- Transport of purchased raw materials to the manufacturing facility is already inside the upstream "market for" datasets that users link to a background database, so it is not modelled a second time here. This does not cover freight between REEL production stages, which is modelled where a dataset authors it.
- Returnable shipping containers
- Where freight between production stages is modelled, the mass moved is the product itself. The shipping container (FOSB, SEMI M31) is returnable capital equipment whose per-trip share is unsourced, so its tare is excluded from the transport effort.
- Photomask fabrication
- A mask set's embodied burden is amortised across a high-volume production run and is not attributed per wafer. Users assessing low-volume production should add mask fabrication separately; the methodology report gives the basis for the exclusion.
- Employee transport, administration and R&D overhead
- Employee transportation, facility administration and R&D/pilot-production overhead are outside scope.
- Capital goods
- Manufacturing equipment, cleanroom construction and facility infrastructure are excluded, on the grounds of absent public data on equipment embodied energy, uncertainty in equipment lifetime and allocation, common practice in electronics LCA, and a focus on the operational inventory. Future versions may include capital goods when sufficient public data becomes available.
- Precious metal recovery credits
- Scrap recovery credits for precious metals are excluded pending data availability.
- Wafer reclaim
- Test wafers and scrap are outside the system boundary.
Inside the boundary, linked rather than modelled
- Silicon ingot growth and wafer slicing
- Inside the cradle-to-gate scope, but treated as upstream material inputs linked to background databases rather than modelled as REEL processes.
- Freight between production stages
- Where a dataset's product moves between REEL production stages - wafer fabrication to the packaging site, for example - that leg is authored as a transport service and linked to an ecoinvent freight activity. It is measured as a transport effort in tonne-kilometres, not as a mass. Route distances are authored per route class with a stated band; a lower bound of zero is a modelling statement that the two sites can be co-located, not a missing value.
Cut-off criteria
A flow is excluded from a process inventory when it contributes less than 1 % of the total mass of inputs to that unit process, or less than 1 % of its total energy input. The denominator is total process inputs, not product mass. That distinction matters in semiconductor manufacturing, where the input mass of water, chemicals and gases greatly exceeds the product mass, so the threshold removes only genuinely minor flows.
Included regardless of the cut-off
- Perfluorocarbons (CF4, C2F6, SF6, NF3) - high GWP, EPA regulated
- Heavy metals (Pb, Cd, Hg, Cr(VI)) - RoHS regulated, high toxicity
- Volatile organics (photoresist solvents, PGMEA) - air quality
- Precious metals (Au, Ag, Pd, Pt) - high embodied impacts
- Ozone-depleting substances (legacy CFCs, HCFCs) - Montreal Protocol
Precision low-value resistor for current sensing applications. Uses thin film metal alloy (CuMn manganin or NiCr nichrome) on ceramic substrate for ultra-low TCR (<50 ppm/°C) and high stability. Values typically 1mOhm to 100mOhm for power monitoring, battery management, motor control, and overcurrent protection.