Overview
- Technology
- Standard manufacturing process
- Geography
- Global average data from equipment vendor specifications and industry literature
System boundary
The figure groups this dataset's unit processes by class. It is not a count of manufacturing steps — each process runs over as many passes as the flow requires, and those pass counts ship with the dataset.
Data quality and references
Pedigree scores follow the ecoinvent data-quality matrix: 1 is the best attainable, 5 the weakest. The composite is their aggregate.
- Sampling procedure
- Component vendor specifications, academic papers, industry literature
- Coverage status
- Composed from linked REEL datasets
- Pedigree-scored source files
- 39 — the source records behind this dataset's manufacturing operations. Each carries the five pedigree axes above; the composite DQI aggregates them.
Technosphere inputs
17 flows. Quantities are not published; they ship with the dataset on Circa.
Pixel Wafer REEL datasetwafer
- Derivation basis
-
- Calculated by the manufacturing model. The linked REEL dataset carries the upstream life cycle sources.
No source is attached to this row.
- Source citations
- Not stated
- Upstream REEL dataset
- CIS BSI 300mm wafer, 300mm, Japan
- Background dataset
- Modelled by REEL; see the upstream dataset above.
- Notes
- Wafer demand calculated from die count, rectangular wafer packing, die yield and assembly yield. Wafer manufacturing yield is already included upstream.
- Uncertainty
- No range defined.
- Unit
- wafer
Logic Wafer REEL datasetwafer
- Derivation basis
-
- Calculated by the manufacturing model. The linked REEL dataset carries the upstream life cycle sources.
No source is attached to this row.
- Source citations
- Not stated
- Upstream REEL dataset
- 28nm Planar HKMG wafer, 300mm, moderate scenario
- Background dataset
- Modelled by REEL; see the upstream dataset above.
- Notes
- Wafer demand calculated from die count, rectangular wafer packing, die yield and assembly yield. Wafer manufacturing yield is already included upstream.
- Uncertainty
- No range defined.
- Unit
- wafer
Wafer transport, JP fab to packaging site - Air (short haul) Freight transporttkm · -47.4% / +80%
- Derivation basis
-
- Specified for this manufacturing operation and scaled to the dataset's functional unit.
No source is attached to this row.
- Source citations
- Not stated
- Background data
- ecoinvent 3.12
- Background dataset
- transport, freight, aircraft, dedicated freight, short haul
- Notes
- Freight for the part-finished product moving between REEL-modelled sites: the wafer fraction this dataset consumes, travelling from fab to packaging site, cross-border. Shipped mass is that wafer fraction times the wafer mass implied by its declared diameter, times a shipping-packaging factor covering the returnable front-opening shipping box and its secondary carton; the packaging production burden is excluded as returnable, while its mass is carried because freight scales with what is actually shipped. Air freight is allocated on chargeable weight rather than actual shipped mass. The authored band holds the fixed route distance: its lower endpoint uses actual shipped mass, its central uses chargeable-weight allocation, and its upper endpoint adds the separate reusable-carrier return service, not aircraft backhaul.
- Uncertainty
- -47.4% / +80% around the published quantity. The bounds themselves ship with the dataset on Circa.
- Unit
- tkm — tonne-kilometres, a transport effort rather than a mass
Wafer transport, TW fab to packaging site - Air (medium haul) Freight transporttkm · -100% / +521.8%
- Derivation basis
-
- Specified for this manufacturing operation and scaled to the dataset's functional unit.
The sources below come from the manufacturing operations behind this row.
- Sources (inherited)
- Inherited, rolled up from the contributing process steps:
- theedgemalaysia.com (date not recorded). The Edge Malaysia, Condivergence - Chip packaging's place in Malaysia's semiconductor strategy. Trade press article.
- unctad.org (date not recorded). Kam, UNCTAD Project Paper 16, April 2025 (Malaysia semiconductor). Report.
- aseglobal.com (date not recorded). ASE Plants & Offices (first-party site list).
- trendforce.com (date not recorded). TrendForce 2023-10-18, mature vs advanced capacity press release. Trade press article.
- trendforce.com (date not recorded). TrendForce 2025-05-13, 2024 top-10 OSAT ranking. Trade press article.
- How to Ship a Wafer Safely (EMO Trans)
- Background data
- ecoinvent 3.12
- Background dataset
- transport, freight, aircraft, dedicated freight, medium haul
- Notes
- Freight for the part-finished product moving between REEL-modelled sites: the wafer fraction this dataset consumes, travelling from mature-node foundry fab to offshore commodity OSAT share. Shipped mass is that wafer fraction times the wafer mass implied by its declared diameter, times a shipping-packaging factor covering the returnable front-opening shipping box and its secondary carton; the packaging production burden is excluded as returnable, while its mass is carried because freight scales with what is actually shipped. Air freight is allocated on chargeable weight rather than actual shipped mass. The authored band carries marginal mature-lane mode-share uncertainty: the lower endpoint allows this mode's share to be zero and the upper assigns all shipment mass to its own longest-lane air endpoint with chargeable-weight allocation and reusable-carrier return, not aircraft backhaul. Road and air endpoints are anti-correlated and not additive.
- Uncertainty
- -100% / +521.8% around the published quantity. The bounds themselves ship with the dataset on Circa.
- Unit
- tkm — tonne-kilometres, a transport effort rather than a mass
Wafer transport, TW fab to packaging site - Road Freight transporttkm · -100% / +788.9%
- Derivation basis
-
- Specified for this manufacturing operation and scaled to the dataset's functional unit.
The sources below come from the manufacturing operations behind this row.
- Sources (inherited)
- Inherited, rolled up from the contributing process steps:
- Focus Taiwan report, 2026-04-10: ASE Kaohsiung operations
- TrendForce news report, 2024-08-06: SPIL chip-on-wafer order
- Background data
- ecoinvent 3.12
- Background dataset
- transport, freight, lorry, unspecified
- Notes
- Freight for the part-finished product moving between REEL-modelled sites: the wafer fraction this dataset consumes, travelling from mature-node foundry fab to domestic commodity OSAT share. Shipped mass is that wafer fraction times the wafer mass implied by its declared diameter, times a shipping-packaging factor covering the returnable front-opening shipping box and its secondary carton; the packaging production burden is excluded as returnable, while its mass is carried because freight scales with what is actually shipped. Road freight is allocated on actual shipped mass, and the mapped road market already includes carrier empty returns; the central therefore has no return uplift. The authored band carries marginal mature-lane mode-share uncertainty: the lower endpoint allows this mode's share to be zero and the upper assigns all shipment mass to its own physically reachable intra-island road endpoint. Road and air endpoints are anti-correlated and not additive.
- Uncertainty
- -100% / +788.9% around the published quantity. The bounds themselves ship with the dataset on Circa.
- Unit
- tkm — tonne-kilometres, a transport effort rather than a mass
Electricity, Taiwan (TW) ElectricitykWh · -15.6% / +19.3%
- Derivation basis
-
- Calculated from equipment energy across all manufacturing operations. This model includes no facility support, so the total is the manufacturing operations alone.
No source is attached to this row.
- Source citations
- Not stated
- Background data
- ecoinvent 3.12
- Background dataset
- electricity, high voltage
- Notes
- Energy demand from hybrid bonding and CSP packaging, adjusted for assembly yield.
- Uncertainty
- -15.6% / +19.3% around the published quantity. The bounds themselves ship with the dataset on Circa.
- Unit
- kWh
Process water WaterL · -22.8% / +24.2%
- Derivation basis
-
- Calculated from process-water and ultrapure-water demand across all manufacturing operations. This model includes no facility support, so the demand is the manufacturing operations alone. The fresh intake shown is that demand less the share reused under the water-recycling scenario this dataset assumes, and wastewater follows the same balance.
No source is attached to this row.
- Source citations
- Not stated
- Background data
- ecoinvent 3.12
- Background dataset
- tap water
- Notes
- Aggregated water demand of this dataset's production stages.
- Uncertainty
- -22.8% / +24.2% around the published quantity. The bounds themselves ship with the dataset on Circa.
- Unit
- L
N2 Process gasg
- Derivation basis
-
- Calculated from per-operation consumption, operation counts, and manufacturing yield.
No source is attached to this row.
- Source citations
- Not stated
- Background data
- ecoinvent 3.12
- Background dataset
- nitrogen, liquid
- Uncertainty
- No range defined.
- Unit
- g
Copper sulfate pentahydrate (electroless) Process chemicalg
- Derivation basis
-
- Calculated from per-operation consumption, operation counts, and manufacturing yield.
No source is attached to this row.
- Source citations
- Not stated
- Background data
- ecoinvent 3.12
- Background dataset
- copper sulfate
- Uncertainty
- No range defined.
- Unit
- g
Copper anodes (pattern plating) Process chemicalg
- Derivation basis
-
- Calculated from per-operation consumption, operation counts, and manufacturing yield.
- No retrievable public document identified (metric clarification; per-substrate mass derivation retained in notes)
No source is attached to this row.
- Source citations
- Not stated
- Background data
- ecoinvent 3.12
- Background dataset
- copper, cathode
- Uncertainty
- No range defined.
- Unit
- g
Formaldehyde solution Process chemicalg
- Derivation basis
-
- Calculated from per-operation consumption, operation counts, and manufacturing yield.
No source is attached to this row.
- Source citations
- Not stated
- Background data
- ecoinvent 3.12
- Background dataset
- formaldehyde
- Uncertainty
- No range defined.
- Unit
- g
Palladium chloride Process chemicalg
- Derivation basis
-
- Calculated from per-operation consumption, operation counts, and manufacturing yield.
No source is attached to this row.
- Source citations
- Not stated
- Background data
- proxy-mapped
- Background dataset
- palladium
- Notes
- Proxy mapping uses 60% of the material mass.
- Uncertainty
- No range defined.
- Unit
- g
Nickel sulfate hexahydrate Process chemicalg
- Derivation basis
-
- Calculated from per-operation consumption, operation counts, and manufacturing yield.
No source is attached to this row.
- Source citations
- Not stated
- Background data
- ecoinvent 3.12
- Background dataset
- nickel sulfate
- Uncertainty
- No range defined.
- Unit
- g
Sodium hypophosphite Process chemicalg
- Derivation basis
-
- Calculated from per-operation consumption, operation counts, and manufacturing yield.
No source is attached to this row.
- Source citations
- Not stated
- Background data
- proxy-mapped
- Background dataset
- sodium phosphate
- Uncertainty
- No range defined.
- Unit
- g
Gold potassium cyanide Process chemicalg
- Derivation basis
-
- Calculated from per-operation consumption, operation counts, and manufacturing yield.
No source is attached to this row.
- Source citations
- Not stated
- Background data
- proxy-mapped
- Background dataset
- gold
- Notes
- Proxy mapping uses 68.4% of the material mass.
- Uncertainty
- No range defined.
- Unit
- g
Potassium permanganate Process chemicalg
- Derivation basis
-
- Calculated from per-operation consumption, operation counts, and manufacturing yield.
No source is attached to this row.
- Source citations
- Not stated
- Background data
- ecoinvent 3.12
- Background dataset
- potassium permanganate
- Uncertainty
- No range defined.
- Unit
- g
Dry film photoresist Process chemicalg
- Derivation basis
-
- Calculated from per-operation consumption, operation counts, and manufacturing yield.
No source is attached to this row.
- Source citations
- Not stated
- Background data
- proxy-mapped
- Background dataset
- methyl methacrylate
- Uncertainty
- No range defined.
- Unit
- g
Outputs and waste
Spent CMP slurry Solid wasteg
- Derivation basis
-
- Calculated from the mass balance of spent materials and consumables, with treatment selected from the waste classification.
The sources below are this dataset's own bibliography. They are not tied to this row.
- Source citations (dataset-level)
- Inherited from this dataset's own bibliography, not tied to this row:
- SemiAnalysis and IEEE hybrid bonding process flow
- A-STAR Singapore hybrid bonding research
- BusinessWorld and TweakTown HBM4 specifications
- All About Circuits and Kynix HBM4 specifications
- Background data
- ecoinvent 3.12 treatment route
- Background dataset
- treatment of hazardous waste, underground deposit
- Uncertainty
- No range defined.
- Unit
- g
Copper in wastewater-treatment sludge/recovery Solid wasteg
- Derivation basis
-
- Calculated from the mass balance of spent materials and consumables, with treatment selected from the waste classification.
The sources below are this dataset's own bibliography. They are not tied to this row.
- Source citations (dataset-level)
- Inherited from this dataset's own bibliography, not tied to this row:
- mee.gov.cn (date not recorded). GB 39731-2020, Emission standard of water pollutants for the electronics industry (official MEE PDF) - Table 1 item 13 total copper 0.5 direct / 2.0 indirect mg/L; Table 2 benchmark effluent volumes per wafer / per m2 PCB / per package. Standard.
- gazette.nat.gov.tw (date not recorded). Executive Yuan Gazette Vol. 030 No. 237, 2024-12-18 - amendment to Taiwan Effluent Standards; Attached Table 1 (wafer/semiconductor) and Table 5 (basic metal / surface treatment / electroplating / PCB) copper ladder 3.0 -> 2.0 -> 1.5 -> 1.0 mg/L by vintage and permitted flow. PDF document.
- Background data
- ecoinvent 3.12 treatment route
- Background dataset
- market for copper scrap, sorted, pressed
- Uncertainty
- No range defined.
- Unit
- g
Spent dry film resist Solid wasteg
- Derivation basis
-
- Calculated from the mass balance of spent materials and consumables, with treatment selected from the waste classification.
No source is attached to this row.
- Source citations
- Not stated
- Background data
- ecoinvent 3.12 treatment route
- Background dataset
- treatment of waste plastic, mixture, municipal incineration
- Uncertainty
- No range defined.
- Unit
- g
Manganate desmear sludge Solid wasteg
- Derivation basis
-
- Calculated from the mass balance of spent materials and consumables, with treatment selected from the waste classification.
The sources below are this dataset's own bibliography. They are not tied to this row.
- Source citations (dataset-level)
- Inherited from this dataset's own bibliography, not tied to this row:
- rsc.org. Heterointerfacial adhesion failure mechanism of ultrahigh filler loading containing epoxy composite films for chip substrates.
- tekhpolis.ru (date not recorded). S7439 PROCESS GUIDELINES. PDF document.
- Background data
- ecoinvent 3.12 treatment route
- Background dataset
- treatment of hazardous waste, underground deposit
- Uncertainty
- No range defined.
- Unit
- g
Solder mask develop sludge (unpolymerized resin) Solid wasteg
- Derivation basis
-
- Calculated from the mass balance of spent materials and consumables, with treatment selected from the waste classification.
No source is attached to this row.
- Source citations
- Not stated
- Background data
- ecoinvent 3.12 treatment route
- Background dataset
- treatment of waste plastic, mixture, municipal incineration
- Uncertainty
- No range defined.
- Unit
- g
Phosphorus in wastewater-treatment sludge Solid wasteg
- Derivation basis
-
- Calculated from the mass balance of spent materials and consumables, with treatment selected from the waste classification.
No source is attached to this row.
- Source citations
- Not stated
- Background data
- ecoinvent 3.12 treatment route
- Background dataset
- treatment of hazardous waste, underground deposit
- Uncertainty
- No range defined.
- Unit
- g
Emissions to air
2 elementary flows released to air by this dataset's own operations. Quantities are not published; they ship with the dataset on Circa.
Volatile organic compounds (VOCs) Emission to airg
- Derivation basis
-
- Calculated as an air release, from a mass balance on the process gases going in, with the destruction or removal efficiency of any point-of-use abatement applied.
No source is attached to this row.
- Source citations
- Not stated
- Compartment
- Air (non-urban air or from high stacks)
- ecoinvent 3.12 elementary flow
- NMVOC, non-methane volatile organic compounds
- Uncertainty
- No range defined.
- Unit
- g
Formaldehyde Emission to airg
- Derivation basis
-
- Calculated as an air release, from a mass balance on the process gases going in, with the destruction or removal efficiency of any point-of-use abatement applied.
No source is attached to this row.
- Source citations
- Not stated
- Compartment
- Air (non-urban air or from high stacks)
- Formula
- HCHO
- CAS number
- 50-00-0
- ecoinvent 3.12 elementary flow
- Formaldehyde
- Uncertainty
- No range defined.
- Unit
- g
Emissions to water
4 elementary flows released to water by this dataset's own operations. Quantities are not published; they ship with the dataset on Circa.
Dissolved copper Emission to waterg
- Derivation basis
-
- Calculated as a release to water, from a contaminant mass balance on the process chemistry.
No source is attached to this row.
- Source citations
- Not stated
- Compartment
- Water (surface water)
- Formula
- Cu
- CAS number
- 7440-50-8
- ecoinvent 3.12 elementary flow
- Copper ion
- Uncertainty
- No range defined.
- Unit
- g
Dissolved nickel Emission to waterg
- Derivation basis
-
- Calculated as a release to water, from a contaminant mass balance on the process chemistry.
No source is attached to this row.
- Source citations
- Not stated
- Compartment
- Water (surface water)
- Formula
- Ni2+
- CAS number
- 14701-22-5
- ecoinvent 3.12 elementary flow
- Nickel II
- Uncertainty
- No range defined.
- Unit
- g
Free cyanide Emission to waterg
- Derivation basis
-
- Calculated as a release to water, from a contaminant mass balance on the process chemistry.
No source is attached to this row.
- Source citations
- Not stated
- Compartment
- Water (surface water)
- Formula
- CN-
- CAS number
- 57-12-5
- ecoinvent 3.12 elementary flow
- Cyanide
- Uncertainty
- No range defined.
- Unit
- g
Phosphorus (from hypophosphite) Emission to waterg
- Derivation basis
-
- Calculated as a release to water, from a contaminant mass balance on the process chemistry.
No source is attached to this row.
- Source citations
- Not stated
- Compartment
- Water (surface water)
- Formula
- P
- CAS number
- 7723-14-0
- ecoinvent 3.12 elementary flow
- Phosphorus
- Uncertainty
- No range defined.
- Unit
- g
Flows not quantified
3 flows are recorded for this dataset but carry no quantity — cut off below the significance threshold, or with no background dataset available. They remain inside the declared system boundary; each is listed with its reason.
Cut off - below the significance threshold (1)
Package Mass Materialkg
- Derivation basis
-
- Calculated from per-operation consumption, operation counts, and manufacturing yield.
No source is attached to this row.
- Source citations
- Not stated
- Background data
- cut off
- Background dataset
- Not applicable: this flow is not quantified in the inventory.
- Reason
- Mass-tracking record from the authored model – a package-level mass total, not an individual material input. It is recorded for transparency and excluded from upstream linkage; the package's constituent materials are not itemized in this dataset.
- Uncertainty
- No range defined.
- Unit
- kg
Not modelled (2)
CMP slurry (colloidal silica) Process chemicalg
- Derivation basis
-
- Calculated from per-operation consumption, operation counts, and manufacturing yield.
No source is attached to this row.
- Source citations
- Not stated
- Background data
- not modelled
- Background dataset
- Not applicable: this flow is not quantified in the inventory.
- Reason
- The quantified material is retained, but its authored name does not identify a sufficiently specific background dataset or defensible proxy; background modeling remains an explicit gap.
- Uncertainty
- No range defined.
- Unit
- g
SC-1 solution (NH4OH/H2O2/H2O) Process chemicalg
- Derivation basis
-
- Calculated from per-operation consumption, operation counts, and manufacturing yield.
No source is attached to this row.
- Source citations
- Not stated
- Background data
- not modelled
- Background dataset
- Not applicable: this flow is not quantified in the inventory.
- Reason
- The quantified material is retained, but its authored name does not identify a sufficiently specific background dataset or defensible proxy; background modeling remains an explicit gap.
- Uncertainty
- No range defined.
- Unit
- g
Limitations and unquantified flows (1)
Limits this dataset declares about itself: first any limit stated in its own description, then any limit it declares flow by flow, grouped by channel. Each entry below is the model's own disclosure.
- The back-side illumination thinning, colour-filter array and microlens steps this product advertises are declared deferred on the wafer dataset it references, so they are absent from this inventory as well.
The flows above are this dataset's own records. What follows are the scope rules set once for the whole database in the methodology report, repeated here so every dataset page carries them.
Database-wide boundary policy — applies to every REEL dataset
These boundaries are set once for the whole database, in Chapter 2 of the methodology report, and apply to this dataset wherever they are relevant to it. The excluded flows listed above are specific to this dataset.
- Use phase
- Product operation is outside the cradle-to-gate scope.
- End-of-life treatment
- Recycling and disposal are outside the cradle-to-gate scope.
- Distribution and retail
- The gate is a finished component ready for integration into a higher-level assembly.
- Inbound transport of raw materials
- Transport of purchased raw materials to the manufacturing facility is already inside the upstream "market for" datasets that users link to a background database, so it is not modelled a second time here. This does not cover freight between REEL production stages, which is modelled where a dataset authors it.
- Returnable shipping containers
- Where freight between production stages is modelled, the mass moved is the product itself. The shipping container (FOSB, SEMI M31) is returnable capital equipment whose per-trip share is unsourced, so its tare is excluded from the transport effort.
- Photomask fabrication
- A mask set's embodied burden is amortised across a high-volume production run and is not attributed per wafer. Users assessing low-volume production should add mask fabrication separately; the methodology report gives the basis for the exclusion.
- Employee transport, administration and R&D overhead
- Employee transportation, facility administration and R&D/pilot-production overhead are outside scope.
- Capital goods
- Manufacturing equipment, cleanroom construction and facility infrastructure are excluded, on the grounds of absent public data on equipment embodied energy, uncertainty in equipment lifetime and allocation, common practice in electronics LCA, and a focus on the operational inventory. Future versions may include capital goods when sufficient public data becomes available.
- Precious metal recovery credits
- Scrap recovery credits for precious metals are excluded pending data availability.
- Wafer reclaim
- Test wafers and scrap are outside the system boundary.
Inside the boundary, linked rather than modelled
- Silicon ingot growth and wafer slicing
- Inside the cradle-to-gate scope, but treated as upstream material inputs linked to background databases rather than modelled as REEL processes.
- Freight between production stages
- Where a dataset's product moves between REEL production stages - wafer fabrication to the packaging site, for example - that leg is authored as a transport service and linked to an ecoinvent freight activity. It is measured as a transport effort in tonne-kilometres, not as a mass. Route distances are authored per route class with a stated band; a lower bound of zero is a modelling statement that the two sites can be co-located, not a missing value.
Cut-off criteria
A flow is excluded from a process inventory when it contributes less than 1 % of the total mass of inputs to that unit process, or less than 1 % of its total energy input. The denominator is total process inputs, not product mass. That distinction matters in semiconductor manufacturing, where the input mass of water, chemicals and gases greatly exceeds the product mass, so the threshold removes only genuinely minor flows.
Included regardless of the cut-off
- Perfluorocarbons (CF4, C2F6, SF6, NF3) - high GWP, EPA regulated
- Heavy metals (Pb, Cd, Hg, Cr(VI)) - RoHS regulated, high toxicity
- Volatile organics (photoresist solvents, PGMEA) - air quality
- Precious metals (Au, Ag, Pd, Pt) - high embodied impacts
- Ozone-depleting substances (legacy CFCs, HCFCs) - Montreal Protocol
Backside-illuminated (BSI) CMOS image sensor for smartphone cameras. 12 megapixel resolution with 1.4µm pixel pitch. Stacked design with pixel array wafer bonded to logic wafer for high-speed readout. Advanced color filter array and microlens array for sensitivity.