Overview
- Technology
- ONE counted route: hydrofluorination of butadiene followed by dehydrofluorination of the saturated fluorobutane intermediate. The dehalogenation route is documented below as an alternative and its rows are zeroed, so exactly one route is inventoried.
- Geography
- Global
System boundary
The figure groups this dataset's unit processes by class. It is not a count of manufacturing steps — each process runs over as many passes as the flow requires, and those pass counts ship with the dataset.
Data quality and references
Pedigree scores follow the ecoinvent data-quality matrix: 1 is the best attainable, 5 the weakest. The composite is their aggregate.
- Sampling procedure
- Synthesis-route patents from fluorinated-gas producers, greenhouse-gas inventory guidelines for substance properties, and stoichiometric route calculation. Public production data for this gas is sparse, so reaction energy is carried across from the octafluorocyclobutane dataset.
- Coverage status
- Partial
- Pedigree-scored source files
- Not stated
- Dataset sources
-
- Stoichiometric calculation
- Proxy from C4F8 production
- Patent literature (Showa Denko, Air Products)
- IPCC Guidelines
Technosphere inputs
7 flows. Quantities are not published; they ship with the dataset on Circa.
Butadiene (or derivative) Materialkg · -12.5% / +25%
- Derivation basis
-
- The model specifies this input from the production route, either from the chemistry of the reaction or from the allowance the route sets for it. It also states the excess the route uses and the share it recovers for reuse.
The sources for this row are listed below.
- Source citations (dataset-level)
-
- Patent literature (Showa Denko, Air Products)
- IPCC Guidelines
- Background data
- ecoinvent 3.12
- Background dataset
- butadiene
- Notes
- Available in ecoinvent
- Uncertainty
- -12.5% / +25% around the published quantity. The bounds themselves ship with the dataset on Circa.
- Unit
- kg
Hydrogen fluoride Materialkg · -26% / +40%
- Derivation basis
-
- The model specifies this input from the production route, either from the chemistry of the reaction or from the allowance the route sets for it. It also states the excess the route uses and the share it recovers for reuse.
The sources for this row are listed below.
- Source citations (dataset-level)
-
- Patent literature (Showa Denko, Air Products)
- IPCC Guidelines
- Background data
- ecoinvent 3.12
- Background dataset
- hydrogen fluoride
- Notes
- Available in ecoinvent
- Uncertainty
- -26% / +40% around the published quantity. The bounds themselves ship with the dataset on Circa.
- Unit
- kg
Zinc (dehalogenation route) Materialkg
- Derivation basis
-
- The model specifies this input from the production route, either from the chemistry of the reaction or from the allowance the route sets for it. It also states the excess the route uses and the share it recovers for reuse.
The sources for this row are listed below.
- Source citations (dataset-level)
-
- Patent literature (Showa Denko, Air Products)
- IPCC Guidelines
- Background data
- ecoinvent 3.12
- Background dataset
- zinc
- Notes
- ALTERNATIVE ROUTE - quantity zeroed, NOT counted. Zinc-mediated dehalogenation is one of the published ways to make this gas, but it needs a chlorinated precursor that this inventory does not buy, and the counted route is the hydrogen-fluoride one. Row retained at zero to document the alternative and its ecoinvent link for users modelling it.
- Uncertainty
- A minimum-maximum range is defined for this flow. Bounds ship with the dataset on Circa.
- Unit
- kg
Hydrated lime (wastewater treatment) Materialkg · -50.6% / +148.9%
- Derivation basis
-
- The model specifies this input from the production route, either from the chemistry of the reaction or from the allowance the route sets for it. It also states the excess the route uses and the share it recovers for reuse.
The sources for this row are listed below.
- Source citations (dataset-level)
-
- Patent literature (Showa Denko, Air Products)
- IPCC Guidelines
- Background data
- proxy-mapped
- Background dataset
- calcium carbonate, precipitated
- Notes
- Precipitant for the fluoride in the process wastewater. It supplies the calcium in the calcium fluoride sludge this dataset ships.
- Uncertainty
- -50.6% / +148.9% around the published quantity. The bounds themselves ship with the dataset on Circa.
- Unit
- kg
Electricity, fluorination and synthesis, Global (GLO) ElectricitykWh · -40% / +50%
- Derivation basis
-
- Energy demand specified by the model.
No source is attached to this row.
- Source citations
- Not stated
- Background data
- ecoinvent 3.12
- Background dataset
- electricity, medium voltage
- Notes
- Fluorination reaction and temperature control. Proxy from C4F8
- Uncertainty
- -40% / +50% around the published quantity. The bounds themselves ship with the dataset on Circa.
- Unit
- kWh
Electricity, purification, Global (GLO) ElectricitykWh · -40% / +60%
- Derivation basis
-
- Energy demand specified by the model.
No source is attached to this row.
- Source citations
- Not stated
- Background data
- ecoinvent 3.12
- Background dataset
- electricity, medium voltage
- Notes
- Distillation, isomer separation. C4F6 requires careful purification
- Uncertainty
- -40% / +60% around the published quantity. The bounds themselves ship with the dataset on Circa.
- Unit
- kWh
Fresh water WaterL · -33.3% / +66.7%
- Derivation basis
-
- Water demand specified by the model.
No source is attached to this row.
- Source citations
- Not stated
- Background data
- ecoinvent 3.12
- Background dataset
- tap water
- Uncertainty
- -33.3% / +66.7% around the published quantity. The bounds themselves ship with the dataset on Circa.
- Unit
- L
Outputs and waste
Wastewater to treatment WastewaterL · -28.6% / +71.4%
- Derivation basis
-
- The model estimates this flow from the mass balance of the operation and from the share of material the operation loses.
The sources below are this dataset's own bibliography. They are not tied to this row.
- Source citations (dataset-level)
- Inherited from this dataset's own bibliography, not tied to this row:
- Patent literature (Showa Denko, Air Products)
- IPCC Guidelines
- Background data
- carried, no background dataset
- Background dataset
- wastewater, average
- Uncertainty
- -28.6% / +71.4% around the published quantity. The bounds themselves ship with the dataset on Circa.
- Unit
- L
Over-fluorinated products Solid wasteg · ±50%
- Derivation basis
-
- The model estimates this flow from the mass balance of the operation and from the share of material the operation loses.
The sources below are this dataset's own bibliography. They are not tied to this row.
- Source citations (dataset-level)
- Inherited from this dataset's own bibliography, not tied to this row:
- Patent literature (Showa Denko, Air Products)
- IPCC Guidelines
- Background data
- ecoinvent 3.12 treatment route
- Background dataset
- treatment of hazardous waste, hazardous waste incineration, with energy recovery
- Notes
- C4F8 and saturated byproducts
- Uncertainty
- ±50% around the published quantity. The bounds themselves ship with the dataset on Circa.
- Unit
- g
Calcium fluoride sludge Solid wasteg · -50.3% / +149.7%
- Derivation basis
-
- The model estimates this flow from the mass balance of the operation and from the share of material the operation loses.
The sources below are this dataset's own bibliography. They are not tied to this row.
- Source citations (dataset-level)
- Inherited from this dataset's own bibliography, not tied to this row:
- Patent literature (Showa Denko, Air Products)
- IPCC Guidelines
- Background data
- ecoinvent 3.12 treatment route
- Background dataset
- treatment of inert waste, sanitary landfill
- Notes
- Precipitated from the fluoride in the treated wastewater; the calcium comes from the hydrated-lime input row.
- Uncertainty
- -50.3% / +149.7% around the published quantity. The bounds themselves ship with the dataset on Circa.
- Unit
- g
Zinc residue (dehalogenation route) Solid wasteg
- Derivation basis
-
- The model estimates this flow from the mass balance of the operation and from the share of material the operation loses.
The sources below are this dataset's own bibliography. They are not tied to this row.
- Source citations (dataset-level)
- Inherited from this dataset's own bibliography, not tied to this row:
- Patent literature (Showa Denko, Air Products)
- IPCC Guidelines
- Background data
- ecoinvent 3.12 treatment route
- Background dataset
- treatment of hazardous waste, underground deposit
- Notes
- ALTERNATIVE ROUTE - quantity zeroed, NOT counted. A zinc metal residue is an inorganic waste, so the class is set accordingly for anyone modelling that route.
- Uncertainty
- A minimum-maximum range is defined for this flow. Bounds ship with the dataset on Circa.
- Unit
- g
Emissions to air
2 elementary flows released to air by this dataset's own operations. Quantities are not published; they ship with the dataset on Circa.
Hexafluorobutadiene (fugitive) Emission to airg
- Derivation basis
-
- The model estimates this flow from the mass balance of the operation and from the share of material the operation loses.
- No corresponding ecoinvent dataset or flow was identified for this entry, so it is published with its own quantity and no background link
The sources below are this dataset's own bibliography. They are not tied to this row.
- Source citations (dataset-level)
- Inherited from this dataset's own bibliography, not tied to this row:
- Patent literature (Showa Denko, Air Products)
- IPCC Guidelines
- Compartment
- Air (non-urban air or from high stacks)
- Formula
- C4F6
- CAS number
- 685-63-2
- ecoinvent 3.12 elementary flow
- Not stated
- Notes
- Minor fugitive losses
- Uncertainty
- A minimum-maximum range is defined for this flow. Bounds ship with the dataset on Circa.
- Unit
- g
Hydrogen fluoride Emission to airg
- Derivation basis
-
- The model estimates this flow from the mass balance of the operation and from the share of material the operation loses.
The sources below are this dataset's own bibliography. They are not tied to this row.
- Source citations (dataset-level)
- Inherited from this dataset's own bibliography, not tied to this row:
- Patent literature (Showa Denko, Air Products)
- IPCC Guidelines
- Compartment
- Air (non-urban air or from high stacks)
- Formula
- HF
- CAS number
- 7664-39-3
- ecoinvent 3.12 elementary flow
- Hydrogen fluoride
- Notes
- Fugitive from synthesis; most captured
- Uncertainty
- A minimum-maximum range is defined for this flow. Bounds ship with the dataset on Circa.
- Unit
- g
Emissions to water
2 elementary flows released to water by this dataset's own operations. Quantities are not published; they ship with the dataset on Circa.
Fluoride ion Emission to waterg
- Derivation basis
-
- The model estimates this flow from the mass balance of the operation and from the share of material the operation loses.
The sources below are this dataset's own bibliography. They are not tied to this row.
- Source citations (dataset-level)
- Inherited from this dataset's own bibliography, not tied to this row:
- Patent literature (Showa Denko, Air Products)
- IPCC Guidelines
- Compartment
- Water (surface water)
- Formula
- F-
- CAS number
- 16984-48-8
- ecoinvent 3.12 elementary flow
- Fluoride
- Notes
- Dissolved fluoride remaining after lime precipitation. The bulk of the captured fluoride leaves as the calcium fluoride sludge instead.
- Uncertainty
- A minimum-maximum range is defined for this flow. Bounds ship with the dataset on Circa.
- Unit
- g
Chloride ion (dehalogenation route) Emission to waterg
- Derivation basis
-
- The model estimates this flow from the mass balance of the operation and from the share of material the operation loses.
The sources below are this dataset's own bibliography. They are not tied to this row.
- Source citations (dataset-level)
- Inherited from this dataset's own bibliography, not tied to this row:
- Patent literature (Showa Denko, Air Products)
- IPCC Guidelines
- Compartment
- Water (surface water)
- Formula
- Cl-
- CAS number
- 16887-00-6
- ecoinvent 3.12 elementary flow
- Chloride
- Notes
- ALTERNATIVE ROUTE - quantity zeroed, NOT counted. The counted hydrogen-fluoride route brings no chlorine into the process.
- Uncertainty
- A minimum-maximum range is defined for this flow. Bounds ship with the dataset on Circa.
- Unit
- g
Flows not quantified
No flows are recorded for this dataset without a quantity.
Limitations and unquantified flows (2)
Limits this dataset declares about itself: first any limit stated in its own description, then any limit it declares flow by flow, grouped by channel. Each entry below is the model's own disclosure.
- Most of the hydrogen displaced from the butadiene as it is fluorinated is not carried by any output flow. On the idealised route it would leave as hydrogen gas, but no public source for this gas quantifies that stream, so it is declared rather than invented.
- Roughly a tenth of the fluorine entering as hydrogen fluoride is likewise not carried by any output flow.
The flows above are this dataset's own records. What follows are the scope rules set once for the whole database in the methodology report, repeated here so every dataset page carries them.
Boundary declared by this dataset
Gate-to-gate synthesis via the butadiene + hydrogen fluoride route
Database-wide boundary policy — applies to every REEL dataset
These boundaries are set once for the whole database, in Chapter 2 of the methodology report, and apply to this dataset wherever they are relevant to it. The excluded flows listed above are specific to this dataset.
- Use phase
- Product operation is outside the cradle-to-gate scope.
- End-of-life treatment
- Recycling and disposal are outside the cradle-to-gate scope.
- Distribution and retail
- The gate is a finished component ready for integration into a higher-level assembly.
- Inbound transport of raw materials
- Transport of purchased raw materials to the manufacturing facility is already inside the upstream "market for" datasets that users link to a background database, so it is not modelled a second time here. This does not cover freight between REEL production stages, which is modelled where a dataset authors it.
- Returnable shipping containers
- Where freight between production stages is modelled, the mass moved is the product itself. The shipping container (FOSB, SEMI M31) is returnable capital equipment whose per-trip share is unsourced, so its tare is excluded from the transport effort.
- Photomask fabrication
- A mask set's embodied burden is amortised across a high-volume production run and is not attributed per wafer. Users assessing low-volume production should add mask fabrication separately; the methodology report gives the basis for the exclusion.
- Employee transport, administration and R&D overhead
- Employee transportation, facility administration and R&D/pilot-production overhead are outside scope.
- Capital goods
- Manufacturing equipment, cleanroom construction and facility infrastructure are excluded, on the grounds of absent public data on equipment embodied energy, uncertainty in equipment lifetime and allocation, common practice in electronics LCA, and a focus on the operational inventory. Future versions may include capital goods when sufficient public data becomes available.
- Precious metal recovery credits
- Scrap recovery credits for precious metals are excluded pending data availability.
- Wafer reclaim
- Test wafers and scrap are outside the system boundary.
Inside the boundary, linked rather than modelled
- Silicon ingot growth and wafer slicing
- Inside the cradle-to-gate scope, but treated as upstream material inputs linked to background databases rather than modelled as REEL processes.
- Freight between production stages
- Where a dataset's product moves between REEL production stages - wafer fabrication to the packaging site, for example - that leg is authored as a transport service and linked to an ecoinvent freight activity. It is measured as a transport effort in tonne-kilometres, not as a mass. Route distances are authored per route class with a stated band; a lower bound of zero is a modelling statement that the two sites can be co-located, not a missing value.
Cut-off criteria
A flow is excluded from a process inventory when it contributes less than 1 % of the total mass of inputs to that unit process, or less than 1 % of its total energy input. The denominator is total process inputs, not product mass. That distinction matters in semiconductor manufacturing, where the input mass of water, chemicals and gases greatly exceeds the product mass, so the threshold removes only genuinely minor flows.
Included regardless of the cut-off
- Perfluorocarbons (CF4, C2F6, SF6, NF3) - high GWP, EPA regulated
- Heavy metals (Pb, Cd, Hg, Cr(VI)) - RoHS regulated, high toxicity
- Volatile organics (photoresist solvents, PGMEA) - air quality
- Precious metals (Au, Ag, Pd, Pt) - high embodied impacts
- Ozone-depleting substances (legacy CFCs, HCFCs) - Montreal Protocol
Not stated